According to our (Global Info Research) latest study, the global Vacuum Gate Valve for Semiconductor market size was valued at US$ 371 million in 2025 and is forecast to a readjusted size of US$ 569 million by 2032 with a CAGR of 6.1% during review period.
In this report, “Vacuum Gate Valve for Semiconductor” refers to a vacuum isolation valve assembly used in semiconductor manufacturing equipment that opens and closes a flow path by a linear “gate” (plate) motion, providing fast, low-leak, low-particle isolation between vacuum volumes. To better reflect the application and product form of gate valves in the semiconductor industry, this study adopts a gate-mechanism isolation scope and therefore includes: (1) Chamber/Load-Lock Gate Valves used as chamber door valves, load-lock isolation door valves, and pump-side isolation; (2) Slit/Transfer Gate Valves and Transfer Doors used at wafer transfer interfaces (rectangular “transfer slit” openings) between a transfer chamber and process chambers or load locks—often labeled in the industry as slit valves, transfer valves, or vacuum transfer doors, and frequently presented as separate catalog categories due to geometry and interface requirements, while remaining gate-type isolation mechanisms in engineering terms; and (3) All-Metal Gate Valves designed for UHV, bake-out, high-temperature, or high-cycle operation using metal sealing/all-metal structures.
The scope excludes: (a) non-gate vacuum valves such as butterfly valves, pendulum valves, angle/inline/cylinder valves, check valves, pressure relief/venting valves, gas dosing/leak valves, and other functional valves even if vacuum-rated; (b) components and spare parts that do not constitute a complete valve assembly (seals, plates, actuators, controllers, etc.).
Typical in-tool use positions include process chamber door isolation, load-lock isolation, transfer-chamber-to-process/load-lock slit/transfer isolation, and all-metal gate valves required by advanced process or UHV conditions.
In general, a Gate Valve is a valve used to isolate/open a vacuum channel; it can be used for chamber doors, load locks, pump port isolation, pipeline isolation, etc., and the opening shape can be round, rectangular, or customized.
In 2025, the average price of a vacuum gate valve worldwide will be approximately US$2,828 per unit, with total sales of 127,600 units.
Product and Application Structure Characteristics
Product Types: Pneumatic valves dominate the market, accounting for 98.75% of sales revenue and 98.14% of sales volume in 2024. The proportion is expected to further increase to 98.95% by 2031. Manual valves are only used in low-frequency scenarios such as R&D laboratories and equipment maintenance, accounting for a mere 1.25% of sales revenue in 2024, with a continuously shrinking share.
Application Fields: Thin film deposition equipment (50.92% of sales revenue in 2024) and etching equipment (30.54% in 2024) are core application scenarios, collectively contributing over 80% of market demand. Demand in niche segments such as ion implantation equipment, electron beam metrology & inspection equipment, and photolithography machines is growing steadily, with CAGRs exceeding 5% from 2025 to 2031.
Market Competition Landscape
High Concentration: In 2024, the world's top five enterprises (VAT Group AG, V-TEX Corporation, PRESYS Co., Ltd, HVA, Pfeiffer Vacuum) collectively accounted for 80.07% of the market share, showing a significant leading effect.
Dominance by Leading Enterprises: Switzerland-based VAT Group AG ranks first with a 38.24% revenue share, followed by Japan's V-TEX Corporation with 29.24%, and the two together hold over 67% of the market share. Enterprises from South Korea, Taiwan China, and Mainland China mostly focus on the mid-to-low-end market or niche scenarios, with relatively low global shares.
This report is a detailed and comprehensive analysis for global Vacuum Gate Valve for Semiconductor market. Both quantitative and qualitative analyses are presented by manufacturers, by region & country, by Type and by Application. As the market is constantly changing, this report explores the competition, supply and demand trends, as well as key factors that contribute to its changing demands across many markets. Company profiles and product examples of selected competitors, along with market share estimates of some of the selected leaders for the year 2025, are provided.
Key Features:
Global Vacuum Gate Valve for Semiconductor market size and forecasts, in consumption value ($ Million), sales quantity (K Units), and average selling prices (US$/Unit), 2021-2032
Global Vacuum Gate Valve for Semiconductor market size and forecasts by region and country, in consumption value ($ Million), sales quantity (K Units), and average selling prices (US$/Unit), 2021-2032
Global Vacuum Gate Valve for Semiconductor market size and forecasts, by Type and by Application, in consumption value ($ Million), sales quantity (K Units), and average selling prices (US$/Unit), 2021-2032
Global Vacuum Gate Valve for Semiconductor market shares of main players, shipments in revenue ($ Million), sales quantity (K Units), and ASP (US$/Unit), 2021-2026
The Primary Objectives in This Report Are:
To determine the size of the total market opportunity of global and key countries
To assess the growth potential for Vacuum Gate Valve for Semiconductor
To forecast future growth in each product and end-use market
To assess competitive factors affecting the marketplace
This report profiles key players in the global Vacuum Gate Valve for Semiconductor market based on the following parameters - company overview, sales quantity, revenue, price, gross margin, product portfolio, geographical presence, and key developments. Key companies covered as a part of this study include VAT Group AG, V-TEX Corporation, PRESYS Co., Ltd, HVA, Pfeiffer Vacuum, SMC, HTC Vacuum, MKS Instruments, SCIENCE PROBE Co., Ltd, Kunshan Kinglai Hygienic Materials, etc.
This report also provides key insights about market drivers, restraints, opportunities, new product launches or approvals.
Market Segmentation
Vacuum Gate Valve for Semiconductor market is split by Type and by Application. For the period 2021-2032, the growth among segments provides accurate calculations and forecasts for consumption value by Type, and by Application in terms of volume and value. This analysis can help you expand your business by targeting qualified niche markets.
Market segment by Type
Manual
Pneumatic
Market segment by Shape
Circular Gate Valve
Rectangular Gate Valve
Market segment by Vacuum Pressure
HV Gate Valve
UHV Gate Valve
Market segment by Application
Etching Equipment
Thin Film Deposition Equipment
Ion Implantation Equipment
Electron Beam Metrology & Inspection Equipment
Photolithography Machine
Cleaning Equipment
Others
Major players covered
VAT Group AG
V-TEX Corporation
PRESYS Co., Ltd
HVA
Pfeiffer Vacuum
SMC
HTC Vacuum
MKS Instruments
SCIENCE PROBE Co., Ltd
Kunshan Kinglai Hygienic Materials
i-San Inc
Sino Multi-Micro Technology Co., Ltd
Trust Clean Tech
Market segment by region, regional analysis covers
North America (United States, Canada, and Mexico)
Europe (Germany, France, United Kingdom, Russia, Italy, and Rest of Europe)
Asia-Pacific (China, Japan, Korea, India, Southeast Asia, and Australia)
South America (Brazil, Argentina, Colombia, and Rest of South America)
Middle East & Africa (Saudi Arabia, UAE, Egypt, South Africa, and Rest of Middle East & Africa)
The content of the study subjects, includes a total of 15 chapters:
Chapter 1, to describe Vacuum Gate Valve for Semiconductor product scope, market overview, market estimation caveats and base year.
Chapter 2, to profile the top manufacturers of Vacuum Gate Valve for Semiconductor, with price, sales quantity, revenue, and global market share of Vacuum Gate Valve for Semiconductor from 2021 to 2026.
Chapter 3, the Vacuum Gate Valve for Semiconductor competitive situation, sales quantity, revenue, and global market share of top manufacturers are analyzed emphatically by landscape contrast.
Chapter 4, the Vacuum Gate Valve for Semiconductor breakdown data are shown at the regional level, to show the sales quantity, consumption value, and growth by regions, from 2021 to 2032.
Chapter 5 and 6, to segment the sales by Type and by Application, with sales market share and growth rate by Type, by Application, from 2021 to 2032.
Chapter 7, 8, 9, 10 and 11, to break the sales data at the country level, with sales quantity, consumption value, and market share for key countries in the world, from 2021 to 2026.and Vacuum Gate Valve for Semiconductor market forecast, by regions, by Type, and by Application, with sales and revenue, from 2027 to 2032.
Chapter 12, market dynamics, drivers, restraints, trends, and Porters Five Forces analysis.
Chapter 13, the key raw materials and key suppliers, and industry chain of Vacuum Gate Valve for Semiconductor.
Chapter 14 and 15, to describe Vacuum Gate Valve for Semiconductor sales channel, distributors, customers, research findings and conclusion.
Summary:
Get latest Market Research Reports on Vacuum Gate Valve for Semiconductor. Industry analysis & Market Report on Vacuum Gate Valve for Semiconductor is a syndicated market report, published as Global Vacuum Gate Valve for Semiconductor Market 2026 by Manufacturers, Regions, Type and Application, Forecast to 2032. It is complete Research Study and Industry Analysis of Vacuum Gate Valve for Semiconductor market, to understand, Market Demand, Growth, trends analysis and Factor Influencing market.