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Machinery & Equipment Global Thermal Mass Flow Controller Supply, Demand and Key Producers, 2026-2032

  • RnM4669658
    • |
  • 22 January, 2026
    • |
  • Global
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  • 139 Pages
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  • GIR
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  • Machinery & Equipment

The global Thermal Mass Flow Controller market size is expected to reach $ 1746 million by 2032, rising at a market growth of 7.3% CAGR during the forecast period (2026-2032).
A Thermal Mass Flow Controller (Thermal MFC) is a flow control device that uses the principle of heat transfer to measure and regulate the mass flow rate of gases. It operates by heating a small portion of the gas stream and detecting the temperature difference between upstream and downstream sensors; this temperature differential is directly proportional to the mass flow of the gas, allowing the device to calculate and control flow independent of pressure and temperature fluctuations. A thermal MFC integrates a flow sensor, a proportional control valve, and an electronic control circuit that continuously compares the actual flow with the setpoint and adjusts the valve opening to maintain precise, stable delivery. Because of their high accuracy, repeatability, and ability to handle very low flow rates, thermal MFCs are widely used in semiconductor manufacturing, pharmaceuticals, chemical processing, energy systems, environmental monitoring, and laboratory research, where reliable and precise gas dosing or mixing is essential for process stability and product quality.
In 2024, global Thermal Mass Flow Controller production reached approximately 980,000 units , with an average global market price of around US$ 950 per unit.
The Thermal Mass Flow Controller (Thermal MFC) market demonstrates strong growth potential, driven by the rising global need for precise and reliable gas flow measurement and control across high-value industries such as semiconductors, pharmaceuticals, biotechnology, specialty chemicals, energy, and advanced research laboratories, as thermal MFCs leverage heat transfer principles to deliver exceptional accuracy, stability, and repeatability, particularly at ultra-low and highly sensitive flow rates, making them indispensable in semiconductor fabrication processes like CVD, ALD, and etching, where tight control of process gases directly impacts wafer yield, while the pharmaceutical and biotech sectors increasingly rely on thermal MFCs for accurate dosing and mixing of gases in drug formulation, fermentation, and cleanroom environments to meet stringent regulatory requirements, and the chemical industry deploys them for safe and efficient handling of corrosive or specialty gases, ensuring consistent product quality and process safety; further opportunities emerge from the global transition toward renewable energy and hydrogen-based economies, as fuel cell development, hydrogen production, and gas analysis systems demand precise gas flow control, while environmental monitoring applications, including emissions testing and air quality analysis, reinforce adoption; advancements in automation and Industry 4.0 are accelerating the integration of smart thermal MFCs with digital communication protocols, remote monitoring, and predictive maintenance capabilities, which enhance operational efficiency and reduce downtime, appealing to manufacturers seeking cost-effective solutions; geographically, Asia-Pacific is leading demand growth due to massive semiconductor and electronics investments, while North America and Europe maintain strong adoption across pharmaceuticals, research, and clean energy projects; as innovations in compact design, faster response times, multi-gas calibration, and expanded flow range broaden their applications, and sustainability initiatives push industries toward higher efficiency and reduced emissions, the thermal mass flow controller market is set to expand robustly, offering long-term opportunities for manufacturers, technology developers, and investors positioned to capitalize on the convergence of precision engineering, digitalization, and green energy trends.
This report studies the global Thermal Mass Flow Controller production, demand, key manufacturers, and key regions.
This report is a detailed and comprehensive analysis of the world market for Thermal Mass Flow Controller and provides market size (US$ million) and Year-over-Year (YoY) Growth, considering 2025 as the base year. This report explores demand trends and competition, as well as details the characteristics of Thermal Mass Flow Controller that contribute to its increasing demand across many markets.
Highlights and key features of the study
Global Thermal Mass Flow Controller total production and demand, 2021-2032, (K Units)
Global Thermal Mass Flow Controller total production value, 2021-2032, (USD Million)
Global Thermal Mass Flow Controller production by region & country, production, value, CAGR, 2021-2032, (USD Million) & (K Units), (based on production site)
Global Thermal Mass Flow Controller consumption by region & country, CAGR, 2021-2032 & (K Units)
U.S. VS China: Thermal Mass Flow Controller domestic production, consumption, key domestic manufacturers and share
Global Thermal Mass Flow Controller production by manufacturer, production, price, value and market share 2021-2026, (USD Million) & (K Units)
Global Thermal Mass Flow Controller production by Type, production, value, CAGR, 2021-2032, (USD Million) & (K Units)
Global Thermal Mass Flow Controller production by Application, production, value, CAGR, 2021-2032, (USD Million) & (K Units)
This report profiles key players in the global Thermal Mass Flow Controller market based on the following parameters - company overview, production, value, price, gross margin, product portfolio, geographical presence, and key developments. Key companies covered as a part of this study include HORIBA, Bronkhorst, MKS Instruments, Brooks, Bürkert, TOKYO KEISO CO.,LTD, Sensirion, AZBIL, Sierra Instruments, Teledyne, etc.
This report also provides key insights about market drivers, restraints, opportunities, new product launches or approvals.
Stakeholders would have ease in decision-making through various strategy matrices used in analyzing the World Thermal Mass Flow Controller market
Detailed Segmentation:
Each section contains quantitative market data including market by value (US$ Millions), volume (production, consumption) & (K Units) and average price (US$/Unit) by manufacturer, by Type, and by Application. Data is given for the years 2021-2032 by year with 2025 as the base year, 2026 as the estimate year, and 2027-2032 as the forecast year.
Global Thermal Mass Flow Controller Market, By Region:
United States
China
Europe
Japan
South Korea
ASEAN
India
Rest of World
Global Thermal Mass Flow Controller Market, Segmentation by Type:
Digital
Analog
Global Thermal Mass Flow Controller Market, Segmentation by Application:
Semiconductor Manufacturing
FPD Industry
Vacuum Coating
General Industry
Others
Companies Profiled:
HORIBA
Bronkhorst
MKS Instruments
Brooks
Bürkert
TOKYO KEISO CO.,LTD
Sensirion
AZBIL
Sierra Instruments
Teledyne
Omega
Hitachi Metals, Ltd
Parker Hannifin
Beijing Aurasky
Kofloc
Accu
Fujikin
Key Questions Answered:
1. How big is the global Thermal Mass Flow Controller market?
2. What is the demand of the global Thermal Mass Flow Controller market?
3. What is the year over year growth of the global Thermal Mass Flow Controller market?
4. What is the production and production value of the global Thermal Mass Flow Controller market?
5. Who are the key producers in the global Thermal Mass Flow Controller market?
6. What are the growth factors driving the market demand?


1 Supply Summary

  • 1.1 Thermal Mass Flow Controller Introduction
  • 1.2 World Thermal Mass Flow Controller Supply & Forecast
    • 1.2.1 World Thermal Mass Flow Controller Production Value (2021 & 2025 & 2032)
    • 1.2.2 World Thermal Mass Flow Controller Production (2021-2032)
    • 1.2.3 World Thermal Mass Flow Controller Pricing Trends (2021-2032)
  • 1.3 World Thermal Mass Flow Controller Production by Region (Based on Production Site)
    • 1.3.1 World Thermal Mass Flow Controller Production Value by Region (2021-2032)
    • 1.3.2 World Thermal Mass Flow Controller Production by Region (2021-2032)
    • 1.3.3 World Thermal Mass Flow Controller Average Price by Region (2021-2032)
    • 1.3.4 North America Thermal Mass Flow Controller Production (2021-2032)
    • 1.3.5 Europe Thermal Mass Flow Controller Production (2021-2032)
    • 1.3.6 China Thermal Mass Flow Controller Production (2021-2032)
    • 1.3.7 Japan Thermal Mass Flow Controller Production (2021-2032)
  • 1.4 Market Drivers, Restraints and Trends
    • 1.4.1 Thermal Mass Flow Controller Market Drivers
    • 1.4.2 Factors Affecting Demand
    • 1.4.3 Thermal Mass Flow Controller Major Market Trends

2 Demand Summary

  • 2.1 World Thermal Mass Flow Controller Demand (2021-2032)
  • 2.2 World Thermal Mass Flow Controller Consumption by Region
    • 2.2.1 World Thermal Mass Flow Controller Consumption by Region (2021-2026)
    • 2.2.2 World Thermal Mass Flow Controller Consumption Forecast by Region (2027-2032)
  • 2.3 United States Thermal Mass Flow Controller Consumption (2021-2032)
  • 2.4 China Thermal Mass Flow Controller Consumption (2021-2032)
  • 2.5 Europe Thermal Mass Flow Controller Consumption (2021-2032)
  • 2.6 Japan Thermal Mass Flow Controller Consumption (2021-2032)
  • 2.7 South Korea Thermal Mass Flow Controller Consumption (2021-2032)
  • 2.8 ASEAN Thermal Mass Flow Controller Consumption (2021-2032)
  • 2.9 India Thermal Mass Flow Controller Consumption (2021-2032)

3 World Manufacturers Competitive Analysis

  • 3.1 World Thermal Mass Flow Controller Production Value by Manufacturer (2021-2026)
  • 3.2 World Thermal Mass Flow Controller Production by Manufacturer (2021-2026)
  • 3.3 World Thermal Mass Flow Controller Average Price by Manufacturer (2021-2026)
  • 3.4 Thermal Mass Flow Controller Company Evaluation Quadrant
  • 3.5 Industry Rank and Concentration Rate (CR)
    • 3.5.1 Global Thermal Mass Flow Controller Industry Rank of Major Manufacturers
    • 3.5.2 Global Concentration Ratios (CR4) for Thermal Mass Flow Controller in 2025
    • 3.5.3 Global Concentration Ratios (CR8) for Thermal Mass Flow Controller in 2025
  • 3.6 Thermal Mass Flow Controller Market: Overall Company Footprint Analysis
    • 3.6.1 Thermal Mass Flow Controller Market: Region Footprint
    • 3.6.2 Thermal Mass Flow Controller Market: Company Product Type Footprint
    • 3.6.3 Thermal Mass Flow Controller Market: Company Product Application Footprint
  • 3.7 Competitive Environment
    • 3.7.1 Historical Structure of the Industry
    • 3.7.2 Barriers of Market Entry
    • 3.7.3 Factors of Competition
  • 3.8 New Entrant and Capacity Expansion Plans
  • 3.9 Mergers, Acquisition, Agreements, and Collaborations

4 United States VS China VS Rest of the World

  • 4.1 United States VS China: Thermal Mass Flow Controller Production Value Comparison
    • 4.1.1 United States VS China: Thermal Mass Flow Controller Production Value Comparison (2021 & 2025 & 2032)
    • 4.1.2 United States VS China: Thermal Mass Flow Controller Production Value Market Share Comparison (2021 & 2025 & 2032)
  • 4.2 United States VS China: Thermal Mass Flow Controller Production Comparison
    • 4.2.1 United States VS China: Thermal Mass Flow Controller Production Comparison (2021 & 2025 & 2032)
    • 4.2.2 United States VS China: Thermal Mass Flow Controller Production Market Share Comparison (2021 & 2025 & 2032)
  • 4.3 United States VS China: Thermal Mass Flow Controller Consumption Comparison
    • 4.3.1 United States VS China: Thermal Mass Flow Controller Consumption Comparison (2021 & 2025 & 2032)
    • 4.3.2 United States VS China: Thermal Mass Flow Controller Consumption Market Share Comparison (2021 & 2025 & 2032)
  • 4.4 United States Based Thermal Mass Flow Controller Manufacturers and Market Share, 2021-2026
    • 4.4.1 United States Based Thermal Mass Flow Controller Manufacturers, Headquarters and Production Site (States, Country)
    • 4.4.2 United States Based Manufacturers Thermal Mass Flow Controller Production Value (2021-2026)
    • 4.4.3 United States Based Manufacturers Thermal Mass Flow Controller Production (2021-2026)
  • 4.5 China Based Thermal Mass Flow Controller Manufacturers and Market Share
    • 4.5.1 China Based Thermal Mass Flow Controller Manufacturers, Headquarters and Production Site (Province, Country)
    • 4.5.2 China Based Manufacturers Thermal Mass Flow Controller Production Value (2021-2026)
    • 4.5.3 China Based Manufacturers Thermal Mass Flow Controller Production (2021-2026)
  • 4.6 Rest of World Based Thermal Mass Flow Controller Manufacturers and Market Share, 2021-2026
    • 4.6.1 Rest of World Based Thermal Mass Flow Controller Manufacturers, Headquarters and Production Site (State, Country)
    • 4.6.2 Rest of World Based Manufacturers Thermal Mass Flow Controller Production Value (2021-2026)
    • 4.6.3 Rest of World Based Manufacturers Thermal Mass Flow Controller Production (2021-2026)

5 Market Analysis by Type

  • 5.1 World Thermal Mass Flow Controller Market Size Overview by Type: 2021 VS 2025 VS 2032
  • 5.2 Segment Introduction by Type
    • 5.2.1 Digital
    • 5.2.2 Analog
  • 5.3 Market Segment by Type
    • 5.3.1 World Thermal Mass Flow Controller Production by Type (2021-2032)
    • 5.3.2 World Thermal Mass Flow Controller Production Value by Type (2021-2032)
    • 5.3.3 World Thermal Mass Flow Controller Average Price by Type (2021-2032)

6 Market Analysis by Application

  • 6.1 World Thermal Mass Flow Controller Market Size Overview by Application: 2021 VS 2025 VS 2032
  • 6.2 Segment Introduction by Application
    • 6.2.1 Semiconductor Manufacturing
    • 6.2.2 FPD Industry
    • 6.2.3 Vacuum Coating
    • 6.2.4 General Industry
    • 6.2.5 Others
  • 6.3 Market Segment by Application
    • 6.3.1 World Thermal Mass Flow Controller Production by Application (2021-2032)
    • 6.3.2 World Thermal Mass Flow Controller Production Value by Application (2021-2032)
    • 6.3.3 World Thermal Mass Flow Controller Average Price by Application (2021-2032)

7 Company Profiles

  • 7.1 HORIBA
    • 7.1.1 HORIBA Details
    • 7.1.2 HORIBA Major Business
    • 7.1.3 HORIBA Thermal Mass Flow Controller Product and Services
    • 7.1.4 HORIBA Thermal Mass Flow Controller Production, Price, Value, Gross Margin and Market Share (2021-2026)
    • 7.1.5 HORIBA Recent Developments/Updates
    • 7.1.6 HORIBA Competitive Strengths & Weaknesses
  • 7.2 Bronkhorst
    • 7.2.1 Bronkhorst Details
    • 7.2.2 Bronkhorst Major Business
    • 7.2.3 Bronkhorst Thermal Mass Flow Controller Product and Services
    • 7.2.4 Bronkhorst Thermal Mass Flow Controller Production, Price, Value, Gross Margin and Market Share (2021-2026)
    • 7.2.5 Bronkhorst Recent Developments/Updates
    • 7.2.6 Bronkhorst Competitive Strengths & Weaknesses
  • 7.3 MKS Instruments
    • 7.3.1 MKS Instruments Details
    • 7.3.2 MKS Instruments Major Business
    • 7.3.3 MKS Instruments Thermal Mass Flow Controller Product and Services
    • 7.3.4 MKS Instruments Thermal Mass Flow Controller Production, Price, Value, Gross Margin and Market Share (2021-2026)
    • 7.3.5 MKS Instruments Recent Developments/Updates
    • 7.3.6 MKS Instruments Competitive Strengths & Weaknesses
  • 7.4 Brooks
    • 7.4.1 Brooks Details
    • 7.4.2 Brooks Major Business
    • 7.4.3 Brooks Thermal Mass Flow Controller Product and Services
    • 7.4.4 Brooks Thermal Mass Flow Controller Production, Price, Value, Gross Margin and Market Share (2021-2026)
    • 7.4.5 Brooks Recent Developments/Updates
    • 7.4.6 Brooks Competitive Strengths & Weaknesses
  • 7.5 Bürkert
    • 7.5.1 Bürkert Details
    • 7.5.2 Bürkert Major Business
    • 7.5.3 Bürkert Thermal Mass Flow Controller Product and Services
    • 7.5.4 Bürkert Thermal Mass Flow Controller Production, Price, Value, Gross Margin and Market Share (2021-2026)
    • 7.5.5 Bürkert Recent Developments/Updates
    • 7.5.6 Bürkert Competitive Strengths & Weaknesses
  • 7.6 TOKYO KEISO CO.,LTD
    • 7.6.1 TOKYO KEISO CO.,LTD Details
    • 7.6.2 TOKYO KEISO CO.,LTD Major Business
    • 7.6.3 TOKYO KEISO CO.,LTD Thermal Mass Flow Controller Product and Services
    • 7.6.4 TOKYO KEISO CO.,LTD Thermal Mass Flow Controller Production, Price, Value, Gross Margin and Market Share (2021-2026)
    • 7.6.5 TOKYO KEISO CO.,LTD Recent Developments/Updates
    • 7.6.6 TOKYO KEISO CO.,LTD Competitive Strengths & Weaknesses
  • 7.7 Sensirion
    • 7.7.1 Sensirion Details
    • 7.7.2 Sensirion Major Business
    • 7.7.3 Sensirion Thermal Mass Flow Controller Product and Services
    • 7.7.4 Sensirion Thermal Mass Flow Controller Production, Price, Value, Gross Margin and Market Share (2021-2026)
    • 7.7.5 Sensirion Recent Developments/Updates
    • 7.7.6 Sensirion Competitive Strengths & Weaknesses
  • 7.8 AZBIL
    • 7.8.1 AZBIL Details
    • 7.8.2 AZBIL Major Business
    • 7.8.3 AZBIL Thermal Mass Flow Controller Product and Services
    • 7.8.4 AZBIL Thermal Mass Flow Controller Production, Price, Value, Gross Margin and Market Share (2021-2026)
    • 7.8.5 AZBIL Recent Developments/Updates
    • 7.8.6 AZBIL Competitive Strengths & Weaknesses
  • 7.9 Sierra Instruments
    • 7.9.1 Sierra Instruments Details
    • 7.9.2 Sierra Instruments Major Business
    • 7.9.3 Sierra Instruments Thermal Mass Flow Controller Product and Services
    • 7.9.4 Sierra Instruments Thermal Mass Flow Controller Production, Price, Value, Gross Margin and Market Share (2021-2026)
    • 7.9.5 Sierra Instruments Recent Developments/Updates
    • 7.9.6 Sierra Instruments Competitive Strengths & Weaknesses
  • 7.10 Teledyne
    • 7.10.1 Teledyne Details
    • 7.10.2 Teledyne Major Business
    • 7.10.3 Teledyne Thermal Mass Flow Controller Product and Services
    • 7.10.4 Teledyne Thermal Mass Flow Controller Production, Price, Value, Gross Margin and Market Share (2021-2026)
    • 7.10.5 Teledyne Recent Developments/Updates
    • 7.10.6 Teledyne Competitive Strengths & Weaknesses
  • 7.11 Omega
    • 7.11.1 Omega Details
    • 7.11.2 Omega Major Business
    • 7.11.3 Omega Thermal Mass Flow Controller Product and Services
    • 7.11.4 Omega Thermal Mass Flow Controller Production, Price, Value, Gross Margin and Market Share (2021-2026)
    • 7.11.5 Omega Recent Developments/Updates
    • 7.11.6 Omega Competitive Strengths & Weaknesses
  • 7.12 Hitachi Metals, Ltd
    • 7.12.1 Hitachi Metals, Ltd Details
    • 7.12.2 Hitachi Metals, Ltd Major Business
    • 7.12.3 Hitachi Metals, Ltd Thermal Mass Flow Controller Product and Services
    • 7.12.4 Hitachi Metals, Ltd Thermal Mass Flow Controller Production, Price, Value, Gross Margin and Market Share (2021-2026)
    • 7.12.5 Hitachi Metals, Ltd Recent Developments/Updates
    • 7.12.6 Hitachi Metals, Ltd Competitive Strengths & Weaknesses
  • 7.13 Parker Hannifin
    • 7.13.1 Parker Hannifin Details
    • 7.13.2 Parker Hannifin Major Business
    • 7.13.3 Parker Hannifin Thermal Mass Flow Controller Product and Services
    • 7.13.4 Parker Hannifin Thermal Mass Flow Controller Production, Price, Value, Gross Margin and Market Share (2021-2026)
    • 7.13.5 Parker Hannifin Recent Developments/Updates
    • 7.13.6 Parker Hannifin Competitive Strengths & Weaknesses
  • 7.14 Beijing Aurasky
    • 7.14.1 Beijing Aurasky Details
    • 7.14.2 Beijing Aurasky Major Business
    • 7.14.3 Beijing Aurasky Thermal Mass Flow Controller Product and Services
    • 7.14.4 Beijing Aurasky Thermal Mass Flow Controller Production, Price, Value, Gross Margin and Market Share (2021-2026)
    • 7.14.5 Beijing Aurasky Recent Developments/Updates
    • 7.14.6 Beijing Aurasky Competitive Strengths & Weaknesses
  • 7.15 Kofloc
    • 7.15.1 Kofloc Details
    • 7.15.2 Kofloc Major Business
    • 7.15.3 Kofloc Thermal Mass Flow Controller Product and Services
    • 7.15.4 Kofloc Thermal Mass Flow Controller Production, Price, Value, Gross Margin and Market Share (2021-2026)
    • 7.15.5 Kofloc Recent Developments/Updates
    • 7.15.6 Kofloc Competitive Strengths & Weaknesses
  • 7.16 Accu
    • 7.16.1 Accu Details
    • 7.16.2 Accu Major Business
    • 7.16.3 Accu Thermal Mass Flow Controller Product and Services
    • 7.16.4 Accu Thermal Mass Flow Controller Production, Price, Value, Gross Margin and Market Share (2021-2026)
    • 7.16.5 Accu Recent Developments/Updates
    • 7.16.6 Accu Competitive Strengths & Weaknesses
  • 7.17 Fujikin
    • 7.17.1 Fujikin Details
    • 7.17.2 Fujikin Major Business
    • 7.17.3 Fujikin Thermal Mass Flow Controller Product and Services
    • 7.17.4 Fujikin Thermal Mass Flow Controller Production, Price, Value, Gross Margin and Market Share (2021-2026)
    • 7.17.5 Fujikin Recent Developments/Updates
    • 7.17.6 Fujikin Competitive Strengths & Weaknesses

8 Industry Chain Analysis

  • 8.1 Thermal Mass Flow Controller Industry Chain
  • 8.2 Thermal Mass Flow Controller Upstream Analysis
    • 8.2.1 Thermal Mass Flow Controller Core Raw Materials
    • 8.2.2 Main Manufacturers of Thermal Mass Flow Controller Core Raw Materials
  • 8.3 Midstream Analysis
  • 8.4 Downstream Analysis
  • 8.5 Thermal Mass Flow Controller Production Mode
  • 8.6 Thermal Mass Flow Controller Procurement Model
  • 8.7 Thermal Mass Flow Controller Industry Sales Model and Sales Channels
    • 8.7.1 Thermal Mass Flow Controller Sales Model
    • 8.7.2 Thermal Mass Flow Controller Typical Distributors

9 Research Findings and Conclusion

    10 Appendix

    • 10.1 Methodology
    • 10.2 Research Process and Data Source

    Summary:
    Get latest Market Research Reports on Thermal Mass Flow Controller. Industry analysis & Market Report on Thermal Mass Flow Controller is a syndicated market report, published as Global Thermal Mass Flow Controller Supply, Demand and Key Producers, 2026-2032. It is complete Research Study and Industry Analysis of Thermal Mass Flow Controller market, to understand, Market Demand, Growth, trends analysis and Factor Influencing market.

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