According to our (Global Info Research) latest study, the global Semiconductor Turbomolecular Pump market size was valued at US$ 780 million in 2025 and is forecast to a readjusted size of US$ 1286 million by 2032 with a CAGR of 8.2% during review period.
In 2025, global Molecular Pump for Semiconductor Equipment production capacity is 50,000 units, with production reached approximately 35,000 units, with an average global market price of around US$ 21,000 per unit. The market gross margin is mainly 30%-40%.
A Molecular Pump for Semiconductor Equipment refers mainly to a turbomolecular pump (TMP) used in semiconductor manufacturing vacuum systems to generate and maintain high vacuum and ultra-high vacuum environments, typically from 10⁻³ to 10⁻⁹ mbar. Unlike mechanical pumps that compress gas, molecular pumps operate by transferring momentum to gas molecules through high-speed rotating blades, directing them efficiently toward a backing dry pump. This operating principle enables extremely clean, oil-free vacuum conditions, which are essential for advanced semiconductor processes.
The upstream segment includes precision components and materials such as high-strength metal rotors and stators, magnetic or ceramic bearing systems, high-speed motors, inverters, sensors, and specialized surface coatings for corrosion resistance and particle control. These components require extremely tight tolerances and high reliability, as failures can cause severe tool downtime.
The midstream segment consists of molecular pump manufacturers and vacuum system suppliers. This is the core value-creation stage, involving aerodynamic blade design, bearing control algorithms, thermal management, electronics integration, and compliance with semiconductor fab standards. Molecular pumps are often delivered as part of an integrated vacuum module together with dry pumps and control units, and must undergo lengthy qualification with semiconductor equipment OEMs.
The downstream segment includes semiconductor equipment manufacturers and wafer fabs. Molecular pumps are embedded in process tools and generate additional long-term revenue through spare parts, refurbishment, and service contracts, giving the industry a strong recurring-revenue characteristic.
Looking ahead, the global demand for molecular pumps in semiconductor equipment is expected to grow steadily, driven by advanced process nodes (5nm and below), increased wafer sizes (300mm and future 450mm), and the expansion of logic, memory, and power semiconductor manufacturing. Key development trends include the adoption of high-speed, high-throughput magnetic levitation pumps to reduce downtime and improve process uniformity; the integration of smart sensors for predictive maintenance and remote diagnostics; and enhanced material engineering to resist corrosive process gases. Furthermore, regional supply chain shifts are accelerating domestic innovations in Asia, particularly in China and South Korea, as part of broader equipment localization strategies. In this context, molecular pumps are becoming increasingly strategic components, directly influencing tool uptime, process yield, and fab productivity.
The growth of molecular pumps for semiconductor equipment is driven by technology scaling, increasing process complexity, and structural changes in the semiconductor supply chain.
First, the continued move toward advanced technology nodes significantly raises requirements for vacuum cleanliness, stability, and control. Smaller feature sizes are more sensitive to pressure fluctuations and contamination, making high-performance molecular pumps essential for yield and process repeatability.
Second, vacuum-intensive processes such as etching and ALD are gaining importance, both in terms of process count and technical difficulty. These processes require higher pumping speeds, faster response times, and stronger resistance to corrosive gases, increasing both the number of molecular pumps per tool and the value per pump.
Third, the industry trend toward oil-free, low-particle, high-reliability manufacturing favors magnetic bearing molecular pumps over traditional mechanical designs. Predictive maintenance and smart monitoring capabilities further enhance their attractiveness in high-volume fabs.
Finally, supply chain security and localization strategies driven by geopolitical and strategic considerations are encouraging diversified sourcing and sustained investment in vacuum technologies. Together, these factors underpin the long-term structural growth of the semiconductor molecular pump market.
This report is a detailed and comprehensive analysis for global Semiconductor Turbomolecular Pump market. Both quantitative and qualitative analyses are presented by manufacturers, by region & country, by Type and by Application. As the market is constantly changing, this report explores the competition, supply and demand trends, as well as key factors that contribute to its changing demands across many markets. Company profiles and product examples of selected competitors, along with market share estimates of some of the selected leaders for the year 2025, are provided.
Key Features:
Global Semiconductor Turbomolecular Pump market size and forecasts, in consumption value ($ Million), sales quantity (K Units), and average selling prices (US$/Unit), 2021-2032
Global Semiconductor Turbomolecular Pump market size and forecasts by region and country, in consumption value ($ Million), sales quantity (K Units), and average selling prices (US$/Unit), 2021-2032
Global Semiconductor Turbomolecular Pump market size and forecasts, by Type and by Application, in consumption value ($ Million), sales quantity (K Units), and average selling prices (US$/Unit), 2021-2032
Global Semiconductor Turbomolecular Pump market shares of main players, shipments in revenue ($ Million), sales quantity (K Units), and ASP (US$/Unit), 2021-2026
The Primary Objectives in This Report Are:
To determine the size of the total market opportunity of global and key countries
To assess the growth potential for Semiconductor Turbomolecular Pump
To forecast future growth in each product and end-use market
To assess competitive factors affecting the marketplace
This report profiles key players in the global Semiconductor Turbomolecular Pump market based on the following parameters - company overview, sales quantity, revenue, price, gross margin, product portfolio, geographical presence, and key developments. Key companies covered as a part of this study include Shimadzu Corporation, ULVAC Technologies, Osaka Vacuum, KYKY Vacuum, Ebara Corporation, Edwards, Busch, Leybold Turbovac, Pfeiffer, Beijing Zhongke Instrument, etc.
This report also provides key insights about market drivers, restraints, opportunities, new product launches or approvals.
Market Segmentation
Semiconductor Turbomolecular Pump market is split by Type and by Application. For the period 2021-2032, the growth among segments provides accurate calculations and forecasts for consumption value by Type, and by Application in terms of volume and value. This analysis can help you expand your business by targeting qualified niche markets.
Market segment by Type
Magnetic Bearing TMP
Mechanical Bearing TMP
Market segment by Gas Speed Level
≤1,000 L/s
1,000–3,000 L/s
≥3,000 L/s
Market segment by Operating Condition
Standard TMP
Corrosion-Resistant TMP
Market segment by Application
Semiconductor Manufacturing Equipment
CVD Equipment
PVD Equipment
Ion Implantation
Etching Equipment
Others
Major players covered
Shimadzu Corporation
ULVAC Technologies
Osaka Vacuum
KYKY Vacuum
Ebara Corporation
Edwards
Busch
Leybold Turbovac
Pfeiffer
Beijing Zhongke Instrument
Shanghai Canter Vacuum Technology
Tianjin Feixuan Technology
Zhongke Jiuwei Technology Co., Ltd.
Market segment by region, regional analysis covers
North America (United States, Canada, and Mexico)
Europe (Germany, France, United Kingdom, Russia, Italy, and Rest of Europe)
Asia-Pacific (China, Japan, Korea, India, Southeast Asia, and Australia)
South America (Brazil, Argentina, Colombia, and Rest of South America)
Middle East & Africa (Saudi Arabia, UAE, Egypt, South Africa, and Rest of Middle East & Africa)
The content of the study subjects, includes a total of 15 chapters:
Chapter 1, to describe Semiconductor Turbomolecular Pump product scope, market overview, market estimation caveats and base year.
Chapter 2, to profile the top manufacturers of Semiconductor Turbomolecular Pump, with price, sales quantity, revenue, and global market share of Semiconductor Turbomolecular Pump from 2021 to 2026.
Chapter 3, the Semiconductor Turbomolecular Pump competitive situation, sales quantity, revenue, and global market share of top manufacturers are analyzed emphatically by landscape contrast.
Chapter 4, the Semiconductor Turbomolecular Pump breakdown data are shown at the regional level, to show the sales quantity, consumption value, and growth by regions, from 2021 to 2032.
Chapter 5 and 6, to segment the sales by Type and by Application, with sales market share and growth rate by Type, by Application, from 2021 to 2032.
Chapter 7, 8, 9, 10 and 11, to break the sales data at the country level, with sales quantity, consumption value, and market share for key countries in the world, from 2021 to 2026.and Semiconductor Turbomolecular Pump market forecast, by regions, by Type, and by Application, with sales and revenue, from 2027 to 2032.
Chapter 12, market dynamics, drivers, restraints, trends, and Porters Five Forces analysis.
Chapter 13, the key raw materials and key suppliers, and industry chain of Semiconductor Turbomolecular Pump.
Chapter 14 and 15, to describe Semiconductor Turbomolecular Pump sales channel, distributors, customers, research findings and conclusion.
Summary:
Get latest Market Research Reports on Semiconductor Turbomolecular Pump. Industry analysis & Market Report on Semiconductor Turbomolecular Pump is a syndicated market report, published as Global Semiconductor Turbomolecular Pump Market 2026 by Manufacturers, Regions, Type and Application, Forecast to 2032. It is complete Research Study and Industry Analysis of Semiconductor Turbomolecular Pump market, to understand, Market Demand, Growth, trends analysis and Factor Influencing market.