According to our (Global Info Research) latest study, the global Semiconductor Metrology and Inspection market size was valued at US$ 19780 million in 2025 and is forecast to a readjusted size of US$ 39540 million by 2032 with a CAGR of 10.5% during review period.
Semiconductor Metrology and Inspection are important for the management of the semiconductor manufacturing process. There are 400 to 600 steps in the overall manufacturing process of semiconductor wafers, which are undertaken in the course of one to two months. If any defects occur early on in the process, all the work undertaken in the subsequent time-consuming steps will be wasted. The main segment in the report includes mask inspection, film inspection, optical inspection, wafer defect inspection, macro defect inspection and image wafer inspection, etc.
At present, the global semiconductor metrology and inspection equipment (Semiconductor Metrology and Inspection) market is mainly occupied by well-known companies in the United States, Japan and other countries, such as KLA and AMAT in the United States, and Hitachi High-Technologies in Japan. These companies have obvious advantages in technology, brand, market and other aspects, and occupy a large share of the global market.
In recent years, with the rapid development of China's semiconductor industry and the support of national policies, Chinese semiconductor measurement and inspection equipment companies have also begun to emerge.
The Asia-Pacific region is the largest market, accounting for about 80%; followed by North America and Europe, accounting for about 12% and 7% respectively. In terms of product categories, defect detection equipment products account for the largest proportion, accounting for about 58%. In terms of product applications, it is mainly used in wafers, followed by masks.
Market development trend
Technology upgrade: With the continuous development of semiconductor technology, the requirements for measurement and inspection technology are also getting higher and higher. In the future, with the popularization and application of technologies such as 5G, Internet of Things, and artificial intelligence, semiconductor metrology and inspection equipment will develop towards higher precision, higher speed, and higher intelligence.
Market demand growth: With the continuous growth of the global semiconductor market and the rapid development of emerging fields such as new energy vehicles and intelligent manufacturing, the demand for semiconductor metrology and inspection equipment will continue to grow.
In summary, the semiconductor metrology and inspection market has broad development prospects and huge market potential. In the future, with the continuous advancement of technology and the continuous expansion of the market, the market will usher in more development opportunities and challenges.
This report is a detailed and comprehensive analysis for global Semiconductor Metrology and Inspection market. Both quantitative and qualitative analyses are presented by manufacturers, by region & country, by Type and by Application. As the market is constantly changing, this report explores the competition, supply and demand trends, as well as key factors that contribute to its changing demands across many markets. Company profiles and product examples of selected competitors, along with market share estimates of some of the selected leaders for the year 2025, are provided.
Key Features:
Global Semiconductor Metrology and Inspection market size and forecasts, in consumption value ($ Million), sales quantity (Units), and average selling prices (K US$/Unit), 2021-2032
Global Semiconductor Metrology and Inspection market size and forecasts by region and country, in consumption value ($ Million), sales quantity (Units), and average selling prices (K US$/Unit), 2021-2032
Global Semiconductor Metrology and Inspection market size and forecasts, by Type and by Application, in consumption value ($ Million), sales quantity (Units), and average selling prices (K US$/Unit), 2021-2032
Global Semiconductor Metrology and Inspection market shares of main players, shipments in revenue ($ Million), sales quantity (Units), and ASP (K US$/Unit), 2021-2026
The Primary Objectives in This Report Are:
To determine the size of the total market opportunity of global and key countries
To assess the growth potential for Semiconductor Metrology and Inspection
To forecast future growth in each product and end-use market
To assess competitive factors affecting the marketplace
This report profiles key players in the global Semiconductor Metrology and Inspection market based on the following parameters - company overview, sales quantity, revenue, price, gross margin, product portfolio, geographical presence, and key developments. Key companies covered as a part of this study include KLA Corporation, Applied Materials, Hitachi High-Technologies, ASML, Onto Innovation, Lasertec, SCREEN Semiconductor Solutions, ZEISS, Camtek, Toray Engineering, etc.
This report also provides key insights about market drivers, restraints, opportunities, new product launches or approvals.
Market Segmentation
Semiconductor Metrology and Inspection market is split by Type and by Application. For the period 2021-2032, the growth among segments provides accurate calculations and forecasts for consumption value by Type, and by Application in terms of volume and value. This analysis can help you expand your business by targeting qualified niche markets.
Market segment by Type
Defect Inspection Equipment
Metrology Equipment
Market segment by Process Stages
Front-end Process
Mid-end Process
Back-end Process
Market segment by Technology
Optics
Electron Beam
Other
Market segment by Application
Wafer
Mask/Film
Others
Major players covered
KLA Corporation
Applied Materials
Hitachi High-Technologies
ASML
Onto Innovation
Lasertec
SCREEN Semiconductor Solutions
ZEISS
Camtek
Toray Engineering
Muetec
Merck
Microtronic
RSIC
Nova
Skyverse
Market segment by region, regional analysis covers
North America (United States, Canada, and Mexico)
Europe (Germany, France, United Kingdom, Russia, Italy, and Rest of Europe)
Asia-Pacific (China, Japan, Korea, India, Southeast Asia, and Australia)
South America (Brazil, Argentina, Colombia, and Rest of South America)
Middle East & Africa (Saudi Arabia, UAE, Egypt, South Africa, and Rest of Middle East & Africa)
The content of the study subjects, includes a total of 15 chapters:
Chapter 1, to describe Semiconductor Metrology and Inspection product scope, market overview, market estimation caveats and base year.
Chapter 2, to profile the top manufacturers of Semiconductor Metrology and Inspection, with price, sales quantity, revenue, and global market share of Semiconductor Metrology and Inspection from 2021 to 2026.
Chapter 3, the Semiconductor Metrology and Inspection competitive situation, sales quantity, revenue, and global market share of top manufacturers are analyzed emphatically by landscape contrast.
Chapter 4, the Semiconductor Metrology and Inspection breakdown data are shown at the regional level, to show the sales quantity, consumption value, and growth by regions, from 2021 to 2032.
Chapter 5 and 6, to segment the sales by Type and by Application, with sales market share and growth rate by Type, by Application, from 2021 to 2032.
Chapter 7, 8, 9, 10 and 11, to break the sales data at the country level, with sales quantity, consumption value, and market share for key countries in the world, from 2021 to 2026.and Semiconductor Metrology and Inspection market forecast, by regions, by Type, and by Application, with sales and revenue, from 2027 to 2032.
Chapter 12, market dynamics, drivers, restraints, trends, and Porters Five Forces analysis.
Chapter 13, the key raw materials and key suppliers, and industry chain of Semiconductor Metrology and Inspection.
Chapter 14 and 15, to describe Semiconductor Metrology and Inspection sales channel, distributors, customers, research findings and conclusion.
Summary:
Get latest Market Research Reports on Semiconductor Metrology and Inspection. Industry analysis & Market Report on Semiconductor Metrology and Inspection is a syndicated market report, published as Global Semiconductor Metrology and Inspection Market 2026 by Manufacturers, Regions, Type and Application, Forecast to 2032. It is complete Research Study and Industry Analysis of Semiconductor Metrology and Inspection market, to understand, Market Demand, Growth, trends analysis and Factor Influencing market.