According to our (Global Info Research) latest study, the global Pumps for Semiconductor market size was valued at US$ 2582 million in 2025 and is forecast to a readjusted size of US$ 4412 million by 2032 with a CAGR of 8.0% during review period.
Pumps for Semiconductor refers to specialized pumps that adapt to the entire process requirements of semiconductor front-end wafer manufacturing, back-end packaging and testing, and plant operation and maintenance. They possess core technical characteristics such as high cleanliness, strong corrosion resistance, high precision control, low vibration, and low leakage, and are used for establishing vacuum environments or transporting process fluids/utility media.
The Pumps for Semiconductor market is fundamentally the productivity infrastructure underpinning yield and tool uptime. In wafer-fab front-end processes, vacuum systems determine whether critical steps such as etch, thin-film deposition, and ion implantation can be executed within low-contamination conditions and within stable pressure and controllable pumping-speed process windows. On the facilities side, the conveyance of ultrapure water (UPW), process chemicals, and waste streams directly affects line continuity and EHS compliance. Because pumps are characterized by “equipment qualification/customer certification, tight coupling to process windows, and strong dependence on on-site service,” switching costs are materially higher than for typical electromechanical components. As a result, competition has long centered on “high reliability, low contamination, low total cost of ownership (TCO), and service-network capability.”
Pump demand is highly correlated with WFE and fab CapEx cycles, and is reflected through two channels: “new tool installations” and “the installed base (service, overhaul, and refurbishment).” The high-end vacuum pump segment remains oligopolistic. Edwards has been part of Atlas Copco since 2014; Pfeiffer Vacuum has also clearly positioned itself externally as a member of the Busch Group and, in 2024, upgraded its branding to “Pfeiffer Vacuum+Fab Solutions.” Among Japanese suppliers, EBARA has publicly stated that it holds a leading global position in dry vacuum pumps for semiconductor applications.
Downstream applications and technology choices exhibit clear “scenario-based segmentation.” For front-end core tools (etch, CVD/PVD, ion implantation, etc.), the mainstream configuration is typically a combined vacuum system of “dry backing pump + turbomolecular pump (or other high-vacuum pump).” At advanced nodes and vibration-sensitive applications, magnetic-levitation and other low-vibration solutions are being adopted more rapidly; for example, EBARA’s magnetically levitated turbomolecular pumps claim sub-nanometer vibration levels to meet EUV-related requirements, while Osaka Vacuum has also demonstrated its technology roadmap for ultra-low-vibration turbomolecular pump series. In back-end packaging/test and certain mature-node applications, selection tends to balance cost and maintainability: dry claw pumps/screw pumps and rotary-vane pumps (with oil-mist filtration) coexist, with demand driven more by capacity build-out and equipment renewal.
In facilities and wet-process domains, “non-vacuum pumps” are more strongly governed by materials and duty conditions. UPW and chemical delivery emphasize control of metal-ion leaching, corrosion resistance, low shear, and leak/safety performance. Accordingly, magnetic-levitation and bearingless concepts are gaining penetration in high-purity chemical delivery and microelectronics wet processes. Levitronix, for instance, positions its solutions around “no mechanical bearings, no seal wear, a magnetically levitated impeller, and chemically resistant high-purity polymer pump heads” for semiconductor chemical and wet applications.
Overall, advanced logic and advanced packaging are driving vacuum systems toward “lower vibration, higher reliability, stronger corrosion resistance, and easier maintenance.” The continued premiumization of turbomolecular and dry vacuum pumps, together with a rising share of service revenue, is therefore expected to persist.
This report is a detailed and comprehensive analysis for global Pumps for Semiconductor market. Both quantitative and qualitative analyses are presented by manufacturers, by region & country, by Function and by Application. As the market is constantly changing, this report explores the competition, supply and demand trends, as well as key factors that contribute to its changing demands across many markets. Company profiles and product examples of selected competitors, along with market share estimates of some of the selected leaders for the year 2025, are provided.
Key Features:
Global Pumps for Semiconductor market size and forecasts, in consumption value ($ Million), sales quantity (Units), and average selling prices (US$/Unit), 2021-2032
Global Pumps for Semiconductor market size and forecasts by region and country, in consumption value ($ Million), sales quantity (Units), and average selling prices (US$/Unit), 2021-2032
Global Pumps for Semiconductor market size and forecasts, by Function and by Application, in consumption value ($ Million), sales quantity (Units), and average selling prices (US$/Unit), 2021-2032
Global Pumps for Semiconductor market shares of main players, shipments in revenue ($ Million), sales quantity (Units), and ASP (US$/Unit), 2021-2026
The Primary Objectives in This Report Are:
To determine the size of the total market opportunity of global and key countries
To assess the growth potential for Pumps for Semiconductor
To forecast future growth in each product and end-use market
To assess competitive factors affecting the marketplace
This report profiles key players in the global Pumps for Semiconductor market based on the following parameters - company overview, sales quantity, revenue, price, gross margin, product portfolio, geographical presence, and key developments. Key companies covered as a part of this study include Edwards Vacuum (Atlas), Ebara Corporation, Pfeiffer Vacuum+Fab Solutions (Busch), Kashiyama Industries, SKY Technology Development, Beijing Grand Hitek, Shanghai Hanbell Precise Machinery Co., Ltd, Ningbo Baosi Energy Equipment, LOTVACUUM, Taiko Kikai Industries, etc.
This report also provides key insights about market drivers, restraints, opportunities, new product launches or approvals.
Market Segmentation
Pumps for Semiconductor market is split by Function and by Application. For the period 2021-2032, the growth among segments provides accurate calculations and forecasts for consumption value by Function, and by Application in terms of volume and value. This analysis can help you expand your business by targeting qualified niche markets.
Market segment by Function
Vacuum Pumps
Non-vacuum Pumps (Fluid Transfer Pumps)
Market segment by Pump
Claw Vacuum Pump
Scroll Vacuum Pump
Roots Vacuum Pump
Screw Vacuum Pump
Turbomolecular Pump
Cryo Vacuum Pump
AODD Pump
Diaphragm Metering Pump
Others
Market segment by Application
Thin Film Deposition Equipment
Etching Equipment
Ion Implantation Equipment
Coating & Developing Equipment
Post-Processing Equipment
Facility Management Equipment
Major players covered
Edwards Vacuum (Atlas)
Ebara Corporation
Pfeiffer Vacuum+Fab Solutions (Busch)
Kashiyama Industries
SKY Technology Development
Beijing Grand Hitek
Shanghai Hanbell Precise Machinery Co., Ltd
Ningbo Baosi Energy Equipment
LOTVACUUM
Taiko Kikai Industries
SHI Cryogenics
EVP Vacuum Technology
Scroll Laboratories, Inc
ULVAC, Inc
Highvac Corporation
Osaka Vacuum, Ltd
Shimadzu Corporation
KYKY Vacuum
Shanghai Canter Vacuum Technology
Tianjin Feixuan Technology
Sino Multi-Micro Technology Co., Ltd
PSG Dover
IDEX Corporation
YAMADA
IWAKI
YTS Japan
White Knight Fluid Handling
Argal Srl
Bueno Technology
Dellmeco GmbH
Levitronix
Zhejiang Cheer
Wuxi Shengyi
Panther Tech
Ningbo Genius-Converging
Suzhou Supermag
Shenzhen Sicarrier
Zhejiang Scnict
Agilent Technologies
Hefei Yuchi Vacuum Technology
Market segment by region, regional analysis covers
North America (United States, Canada, and Mexico)
Europe (Germany, France, United Kingdom, Russia, Italy, and Rest of Europe)
Asia-Pacific (China, Japan, Korea, India, Southeast Asia, and Australia)
South America (Brazil, Argentina, Colombia, and Rest of South America)
Middle East & Africa (Saudi Arabia, UAE, Egypt, South Africa, and Rest of Middle East & Africa)
The content of the study subjects, includes a total of 15 chapters:
Chapter 1, to describe Pumps for Semiconductor product scope, market overview, market estimation caveats and base year.
Chapter 2, to profile the top manufacturers of Pumps for Semiconductor, with price, sales quantity, revenue, and global market share of Pumps for Semiconductor from 2021 to 2026.
Chapter 3, the Pumps for Semiconductor competitive situation, sales quantity, revenue, and global market share of top manufacturers are analyzed emphatically by landscape contrast.
Chapter 4, the Pumps for Semiconductor breakdown data are shown at the regional level, to show the sales quantity, consumption value, and growth by regions, from 2021 to 2032.
Chapter 5 and 6, to segment the sales by Function and by Application, with sales market share and growth rate by Function, by Application, from 2021 to 2032.
Chapter 7, 8, 9, 10 and 11, to break the sales data at the country level, with sales quantity, consumption value, and market share for key countries in the world, from 2021 to 2026.and Pumps for Semiconductor market forecast, by regions, by Function, and by Application, with sales and revenue, from 2027 to 2032.
Chapter 12, market dynamics, drivers, restraints, trends, and Porters Five Forces analysis.
Chapter 13, the key raw materials and key suppliers, and industry chain of Pumps for Semiconductor.
Chapter 14 and 15, to describe Pumps for Semiconductor sales channel, distributors, customers, research findings and conclusion.
Summary:
Get latest Market Research Reports on Pumps for Semiconductor. Industry analysis & Market Report on Pumps for Semiconductor is a syndicated market report, published as Global Pumps for Semiconductor Market 2026 by Manufacturers, Regions, Type and Application, Forecast to 2032. It is complete Research Study and Industry Analysis of Pumps for Semiconductor market, to understand, Market Demand, Growth, trends analysis and Factor Influencing market.