According to our (Global Info Research) latest study, the global MEMS Micropump market size was valued at US$ 259 million in 2025 and is forecast to a readjusted size of US$ 446 million by 2032 with a CAGR of 8.1% during review period.
Global sales of MEMS micropumps reached 19 million units in 2025, with an average price of $13 per unit.
MEMS micropump, also known as microelectromechanical system micropump, is a small pump manufactured using micromachining technology. It can transport and control fluids on a microscopic scale. Its main working principle is to use the movement of the pump membrane to cause changes in the volume of the pump chamber. , causing a pressure difference between the inside of the chamber and the outside world, and relying on the pressure difference to open and close the valve to achieve fluid pumping. MEMS micropumps are technically highly precise and controllable, able to achieve nanoscale liquid distribution, provide ultra-smooth and ultra-quiet droplet delivery, and have the ability to respond quickly and precisely. Its pumping accuracy reaches ±5%.
The raw materials for MEMS micropumps primarily consist of 4/6-inch single-crystal silicon wafers as the substrate, accounting for 25–30% of the material cost. Front-side PZT (lead zirconate titanate) or AlN piezoelectric thin films are deposited as the driving oscillator, with the target material and sputtering process accounting for 20–25%. Back-side deep silicon etching forms the cavity and valve port, requiring photoresist, SOI mask, and DRIE gas, totaling 10–15%. Packaging-grade adhesives, gold/aluminum wires, and glass/PDMS cover plates account for 5–10%. The remainder consists of ultrapure water and cleaning chemicals. Overall, silicon-based + piezoelectric materials account for 55–65% of the direct material cost. A 10% increase in silicon wafer price increases the cost per chip by approximately $0.03–0.05, having a limited impact on high-volume medical-grade devices.
This report is a detailed and comprehensive analysis for global MEMS Micropump market. Both quantitative and qualitative analyses are presented by manufacturers, by region & country, by Type and by Application. As the market is constantly changing, this report explores the competition, supply and demand trends, as well as key factors that contribute to its changing demands across many markets. Company profiles and product examples of selected competitors, along with market share estimates of some of the selected leaders for the year 2025, are provided.
Key Features:
Global MEMS Micropump market size and forecasts, in consumption value ($ Million), sales quantity (K Units), and average selling prices (US$/Unit), 2021-2032
Global MEMS Micropump market size and forecasts by region and country, in consumption value ($ Million), sales quantity (K Units), and average selling prices (US$/Unit), 2021-2032
Global MEMS Micropump market size and forecasts, by Type and by Application, in consumption value ($ Million), sales quantity (K Units), and average selling prices (US$/Unit), 2021-2032
Global MEMS Micropump market shares of main players, shipments in revenue ($ Million), sales quantity (K Units), and ASP (US$/Unit), 2021-2026
The Primary Objectives in This Report Are:
To determine the size of the total market opportunity of global and key countries
To assess the growth potential for MEMS Micropump
To forecast future growth in each product and end-use market
To assess competitive factors affecting the marketplace
This report profiles key players in the global MEMS Micropump market based on the following parameters - company overview, sales quantity, revenue, price, gross margin, product portfolio, geographical presence, and key developments. Key companies covered as a part of this study include Bartels Mikrotechnik, Takasago Electric, The Lee Company, Roche, Debiotech, Insulet, Eoflow, Microchip Technology, YW MEMS, Hengmic, etc.
This report also provides key insights about market drivers, restraints, opportunities, new product launches or approvals.
Market Segmentation
MEMS Micropump market is split by Type and by Application. For the period 2021-2032, the growth among segments provides accurate calculations and forecasts for consumption value by Type, and by Application in terms of volume and value. This analysis can help you expand your business by targeting qualified niche markets.
Market segment by Type
Electrostatic Micropump
Thermopneumatic Micropump
Diaphragm Micropump
Jet Pump
Market segment by Valve Structure
With Valve
Without Valve
Market segment by Flow Rate
0.1–10 µL/min
10–200 µL/min
0.5–5 mL/min
Market segment by Application
Medicine
Chemical Industry
Manufacturing
Others
Major players covered
Bartels Mikrotechnik
Takasago Electric
The Lee Company
Roche
Debiotech
Insulet
Eoflow
Microchip Technology
YW MEMS
Hengmic
Market segment by region, regional analysis covers
North America (United States, Canada, and Mexico)
Europe (Germany, France, United Kingdom, Russia, Italy, and Rest of Europe)
Asia-Pacific (China, Japan, Korea, India, Southeast Asia, and Australia)
South America (Brazil, Argentina, Colombia, and Rest of South America)
Middle East & Africa (Saudi Arabia, UAE, Egypt, South Africa, and Rest of Middle East & Africa)
The content of the study subjects, includes a total of 15 chapters:
Chapter 1, to describe MEMS Micropump product scope, market overview, market estimation caveats and base year.
Chapter 2, to profile the top manufacturers of MEMS Micropump, with price, sales quantity, revenue, and global market share of MEMS Micropump from 2021 to 2026.
Chapter 3, the MEMS Micropump competitive situation, sales quantity, revenue, and global market share of top manufacturers are analyzed emphatically by landscape contrast.
Chapter 4, the MEMS Micropump breakdown data are shown at the regional level, to show the sales quantity, consumption value, and growth by regions, from 2021 to 2032.
Chapter 5 and 6, to segment the sales by Type and by Application, with sales market share and growth rate by Type, by Application, from 2021 to 2032.
Chapter 7, 8, 9, 10 and 11, to break the sales data at the country level, with sales quantity, consumption value, and market share for key countries in the world, from 2021 to 2026.and MEMS Micropump market forecast, by regions, by Type, and by Application, with sales and revenue, from 2027 to 2032.
Chapter 12, market dynamics, drivers, restraints, trends, and Porters Five Forces analysis.
Chapter 13, the key raw materials and key suppliers, and industry chain of MEMS Micropump.
Chapter 14 and 15, to describe MEMS Micropump sales channel, distributors, customers, research findings and conclusion.
Summary:
Get latest Market Research Reports on MEMS Micropump. Industry analysis & Market Report on MEMS Micropump is a syndicated market report, published as Global MEMS Micropump Market 2026 by Manufacturers, Regions, Type and Application, Forecast to 2032. It is complete Research Study and Industry Analysis of MEMS Micropump market, to understand, Market Demand, Growth, trends analysis and Factor Influencing market.