Semiconductor Wafer Defect Inspection Equipment Market Report – Research, Industry Analysis Reports and Market Demands

Global Semiconductor Wafer Defect Inspection Equipment Supply, Demand and Key Producers, 2026-2032

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Table of Content

1 Supply Summary

1.1 Semiconductor Wafer Defect Inspection Equipment Introduction
1.2 World Semiconductor Wafer Defect Inspection Equipment Supply & Forecast
- 1.2.1 World Semiconductor Wafer Defect Inspection Equipment Production Value (2021 & 2025 & 2032)
- 1.2.2 World Semiconductor Wafer Defect Inspection Equipment Production (2021-2032)
- 1.2.3 World Semiconductor Wafer Defect Inspection Equipment Pricing Trends (2021-2032)
1.3 World Semiconductor Wafer Defect Inspection Equipment Production by Region (Based on Production Site)
- 1.3.1 World Semiconductor Wafer Defect Inspection Equipment Production Value by Region (2021-2032)
- 1.3.2 World Semiconductor Wafer Defect Inspection Equipment Production by Region (2021-2032)
- 1.3.3 World Semiconductor Wafer Defect Inspection Equipment Average Price by Region (2021-2032)
- 1.3.4 North America Semiconductor Wafer Defect Inspection Equipment Production (2021-2032)
- 1.3.5 Europe Semiconductor Wafer Defect Inspection Equipment Production (2021-2032)
- 1.3.6 China Semiconductor Wafer Defect Inspection Equipment Production (2021-2032)
- 1.3.7 Japan Semiconductor Wafer Defect Inspection Equipment Production (2021-2032)
- 1.3.8 South Korea Semiconductor Wafer Defect Inspection Equipment Production (2021-2032)
- 1.3.9 China Taiwan Semiconductor Wafer Defect Inspection Equipment Production (2021-2032)
- 1.3.10 Southeast Asia Semiconductor Wafer Defect Inspection Equipment Production (2021-2032)
1.4 Market Drivers, Restraints and Trends
- 1.4.1 Semiconductor Wafer Defect Inspection Equipment Market Drivers
- 1.4.2 Factors Affecting Demand
- 1.4.3 Semiconductor Wafer Defect Inspection Equipment Major Market Trends

2 Demand Summary

2.1 World Semiconductor Wafer Defect Inspection Equipment Demand (2021-2032)
2.2 World Semiconductor Wafer Defect Inspection Equipment Consumption by Region
- 2.2.1 World Semiconductor Wafer Defect Inspection Equipment Consumption by Region (2021-2026)
- 2.2.2 World Semiconductor Wafer Defect Inspection Equipment Consumption Forecast by Region (2027-2032)
2.3 United States Semiconductor Wafer Defect Inspection Equipment Consumption (2021-2032)
2.4 China Semiconductor Wafer Defect Inspection Equipment Consumption (2021-2032)
2.5 Europe Semiconductor Wafer Defect Inspection Equipment Consumption (2021-2032)
2.6 Japan Semiconductor Wafer Defect Inspection Equipment Consumption (2021-2032)
2.7 South Korea Semiconductor Wafer Defect Inspection Equipment Consumption (2021-2032)
2.8 ASEAN Semiconductor Wafer Defect Inspection Equipment Consumption (2021-2032)
2.9 India Semiconductor Wafer Defect Inspection Equipment Consumption (2021-2032)

3 World Manufacturers Competitive Analysis

3.1 World Semiconductor Wafer Defect Inspection Equipment Production Value by Manufacturer (2021-2026)
3.2 World Semiconductor Wafer Defect Inspection Equipment Production by Manufacturer (2021-2026)
3.3 World Semiconductor Wafer Defect Inspection Equipment Average Price by Manufacturer (2021-2026)
3.4 Semiconductor Wafer Defect Inspection Equipment Company Evaluation Quadrant
3.5 Industry Rank and Concentration Rate (CR)
- 3.5.1 Global Semiconductor Wafer Defect Inspection Equipment Industry Rank of Major Manufacturers
- 3.5.2 Global Concentration Ratios (CR4) for Semiconductor Wafer Defect Inspection Equipment in 2025
- 3.5.3 Global Concentration Ratios (CR8) for Semiconductor Wafer Defect Inspection Equipment in 2025
3.6 Semiconductor Wafer Defect Inspection Equipment Market: Overall Company Footprint Analysis
- 3.6.1 Semiconductor Wafer Defect Inspection Equipment Market: Region Footprint
- 3.6.2 Semiconductor Wafer Defect Inspection Equipment Market: Company Product Type Footprint
- 3.6.3 Semiconductor Wafer Defect Inspection Equipment Market: Company Product Application Footprint
3.7 Competitive Environment
- 3.7.1 Historical Structure of the Industry
- 3.7.2 Barriers of Market Entry
- 3.7.3 Factors of Competition
3.8 New Entrant and Capacity Expansion Plans
3.9 Mergers, Acquisition, Agreements, and Collaborations

4 United States VS China VS Rest of the World

5 Market Analysis by Type

5.1 World Semiconductor Wafer Defect Inspection Equipment Market Size Overview by Type: 2021 VS 2025 VS 2032
5.2 Segment Introduction by Type
- 5.2.1 Patterned Wafer Defect Inspection System
- 5.2.2 Non-patterned Wafer Defect Inspection System
- 5.2.3 E-beam Wafer Defect Inspection and Classification System
- 5.2.4 Wafer Macro Defects Detection and Classification
- 5.2.5 Wafer Inspection System for Advanced Packaging
5.3 Market Segment by Type
- 5.3.1 World Semiconductor Wafer Defect Inspection Equipment Production by Type (2021-2032)
- 5.3.2 World Semiconductor Wafer Defect Inspection Equipment Production Value by Type (2021-2032)
- 5.3.3 World Semiconductor Wafer Defect Inspection Equipment Average Price by Type (2021-2032)

6 Market Analysis by Application

6.1 World Semiconductor Wafer Defect Inspection Equipment Market Size Overview by Application: 2021 VS 2025 VS 2032
6.2 Segment Introduction by Application
- 6.2.1 300mm Wafer Size
- 6.2.2 200mm Wafer Size
- 6.2.3 Others
6.3 Market Segment by Application
- 6.3.1 World Semiconductor Wafer Defect Inspection Equipment Production by Application (2021-2032)
- 6.3.2 World Semiconductor Wafer Defect Inspection Equipment Production Value by Application (2021-2032)
- 6.3.3 World Semiconductor Wafer Defect Inspection Equipment Average Price by Application (2021-2032)

7 Company Profiles

8 Industry Chain Analysis

8.1 Semiconductor Wafer Defect Inspection Equipment Industry Chain
8.2 Semiconductor Wafer Defect Inspection Equipment Upstream Analysis
- 8.2.1 Semiconductor Wafer Defect Inspection Equipment Core Raw Materials
- 8.2.2 Main Manufacturers of Semiconductor Wafer Defect Inspection Equipment Core Raw Materials
8.3 Midstream Analysis
8.4 Downstream Analysis
8.5 Semiconductor Wafer Defect Inspection Equipment Production Mode
8.6 Semiconductor Wafer Defect Inspection Equipment Procurement Model
8.7 Semiconductor Wafer Defect Inspection Equipment Industry Sales Model and Sales Channels
- 8.7.1 Semiconductor Wafer Defect Inspection Equipment Sales Model
- 8.7.2 Semiconductor Wafer Defect Inspection Equipment Typical Distributors

9 Research Findings and Conclusion

10 Appendix

10.1 Methodology
10.2 Research Process and Data Source

Description

The global Semiconductor Wafer Defect Inspection Equipment market size is expected to reach $ 15940 million by 2032, rising at a market growth of 9.4% CAGR during the forecast period (2026-2032).
Semiconductor inspection runs through the entire semiconductor process, that is, the front-end and back-end. Semiconductor inspection includes optical inspection, electron beam inspection and X-ray measurement. It mainly detects whether there are abnormal quality conditions on the surface of the wafer or in the circuit structure, such as scratches, particle contamination, graphic errors and other defects. Different inspection technologies have obvious differences, mainly reflected in accuracy, speed and inspection purposes.
Semiconductor inspection types include patterned, non-patterned and mask inspection. Among them, patterned defect inspection is divided into bright field and dark field inspection. Both are analyzed through optical signals. The difference is that the bright field is a vertically reflected light signal, while the dark field is a scattered light signal.
Semiconductor optical inspection mainly refers to automatic optical inspection (AOI), which is a key technology with a wide range of uses in wafer manufacturing. Optical inspection is non-contact and has minimal destructiveness to the wafer itself; by performing batch and rapid inspection of wafers, it can meet the manufacturer's requirements for throughput. Optical profilers are also a type of optical inspection equipment, but they are significantly different from AOI equipment. The statistical scope of this article does not include optical profilers. Automatic optical inspection (AOI) is a detection method that obtains the image of the object under test through optical imaging, processes and analyzes it through a specific algorithm, and compares it with the standard template image to obtain the defects of the object under test. As the wafer size gradually shifts to 12 inches, the speed and accuracy of wafer defect detection are becoming more and more important. By replacing manual scratches and other appearance inspections with AOI systems, the speed and quality of wafer output can be improved, thereby reducing the output of scrapped products and reducing labor costs.
This article focuses on the statistics of equipment used for wafer defect inspection, such as patterned wafer defect inspection, non-patterned wafer defect inspection, electron beam wafer defect inspection and X-ray wafer defect inspection.
The global key manufacturers of Wafer Defect Inspection System include KLA Corporation, Applied Materials, ASML, Hitachi High-Tech Corporation, Onto Innovation, Camtek, Skyverse Technology, SCREEN Semiconductor Solutions, Lasertec, NEXTIN, etc. In 2023, the global top 10 players had a share approximately 92.0% in terms of revenue.
In Patterned Wafer Defect Inspection Systems segment are dominated by KLA and Applied Materials;
Unpatterned Wafer Inspection Systems are dominated by KLA and Hitachi High-Tech Corporation; e-Beam Wafer Defect Review and Classification Systems are dominated by ASML and Applied Materials.
The global market for semiconductor was estimated at US$ 526.8 billion in the year 2023, is projected to US$ 780.7 billion by 2030. IC Manufacturing is the process used to manufacture semiconductor devices, typically integrated circuits (ICs) such as computer processors, microcontrollers, and memory chips (such as NAND flash and DRAM). According to our research, the global semiconductor manufacturing (wafer fabrication) market is projected to grow from US$ 251.7 billion in 2023 to US$ 506.5 billion by 2030, at a Compound Annual Growth Rate (CAGR) of 40.49% during the forecast period. This will drive rapid growth of global Wafer Defect Inspection System.
This report studies the global Semiconductor Wafer Defect Inspection Equipment production, demand, key manufacturers, and key regions.
This report is a detailed and comprehensive analysis of the world market for Semiconductor Wafer Defect Inspection Equipment and provides market size (US$ million) and Year-over-Year (YoY) Growth, considering 2025 as the base year. This report explores demand trends and competition, as well as details the characteristics of Semiconductor Wafer Defect Inspection Equipment that contribute to its increasing demand across many markets.
Highlights and key features of the study
Global Semiconductor Wafer Defect Inspection Equipment total production and demand, 2021-2032, (Units)
Global Semiconductor Wafer Defect Inspection Equipment total production value, 2021-2032, (USD Million)
Global Semiconductor Wafer Defect Inspection Equipment production by region & country, production, value, CAGR, 2021-2032, (USD Million) & (Units), (based on production site)
Global Semiconductor Wafer Defect Inspection Equipment consumption by region & country, CAGR, 2021-2032 & (Units)
U.S. VS China: Semiconductor Wafer Defect Inspection Equipment domestic production, consumption, key domestic manufacturers and share
Global Semiconductor Wafer Defect Inspection Equipment production by manufacturer, production, price, value and market share 2021-2026, (USD Million) & (Units)
Global Semiconductor Wafer Defect Inspection Equipment production by Type, production, value, CAGR, 2021-2032, (USD Million) & (Units)
Global Semiconductor Wafer Defect Inspection Equipment production by Application, production, value, CAGR, 2021-2032, (USD Million) & (Units)
This report profiles key players in the global Semiconductor Wafer Defect Inspection Equipment market based on the following parameters - company overview, production, value, price, gross margin, product portfolio, geographical presence, and key developments. Key companies covered as a part of this study include KLA Corporation, Applied Materials, Lasertec, Hitachi High-Tech Corporation, ASML, Onto Innovation, Camtek, SCREEN Semiconductor Solutions, Skyverse Technology, Toray Engineering, etc.
This report also provides key insights about market drivers, restraints, opportunities, new product launches or approvals.
Stakeholders would have ease in decision-making through various strategy matrices used in analyzing the World Semiconductor Wafer Defect Inspection Equipment market
Detailed Segmentation:
Each section contains quantitative market data including market by value (US$ Millions), volume (production, consumption) & (Units) and average price (US$/Unit) by manufacturer, by Type, and by Application. Data is given for the years 2021-2032 by year with 2025 as the base year, 2026 as the estimate year, and 2027-2032 as the forecast year.
Global Semiconductor Wafer Defect Inspection Equipment Market, By Region:
United States
China
Europe
Japan
South Korea
ASEAN
India
Rest of World
Global Semiconductor Wafer Defect Inspection Equipment Market, Segmentation by Type:
Patterned Wafer Defect Inspection System
Non-patterned Wafer Defect Inspection System
E-beam Wafer Defect Inspection and Classification System
Wafer Macro Defects Detection and Classification
Wafer Inspection System for Advanced Packaging
Global Semiconductor Wafer Defect Inspection Equipment Market, Segmentation by Application:
300mm Wafer Size
200mm Wafer Size
Others
Companies Profiled:
KLA Corporation
Applied Materials
Lasertec
Hitachi High-Tech Corporation
ASML
Onto Innovation
Camtek
SCREEN Semiconductor Solutions
Skyverse Technology
Toray Engineering
NEXTIN
Suzhou TZTEK (Muetec)
Microtronic
Bruker
SMEE
Hangzhou Changchuan Technology
Wuhan Jingce Electronic Group
Angkun Vision (Beijing) Technology
Nanotronics
Visiontec Group
Hefei Yuwei Semiconductor Technology
Suzhou Secote (Optima)
DJEL
Jiangsu VPTEK
Ever Red New Technology
Confovis
Zhongdao Optoelectronic
Suzhou Xinshi Technology
RSIC scientific instrument (Shanghai)
Gaoshi Technology (Suzhou)
Unity Semiconductor SAS
JUTZE Intelligence Technology
Chroma ATE Inc
CMIT
Engitist Corporation
HYE Technology
Shuztung Group
Cortex Robotics
Takano
Shanghai Techsense
Key Questions Answered:
1. How big is the global Semiconductor Wafer Defect Inspection Equipment market?
2. What is the demand of the global Semiconductor Wafer Defect Inspection Equipment market?
3. What is the year over year growth of the global Semiconductor Wafer Defect Inspection Equipment market?
4. What is the production and production value of the global Semiconductor Wafer Defect Inspection Equipment market?
5. Who are the key producers in the global Semiconductor Wafer Defect Inspection Equipment market?
6. What are the growth factors driving the market demand?

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