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Global Semiconductor Gas Abatement Systems Market 2026 by Manufacturers, Regions, Type and Application, Forecast to 2032

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1 Market Overview

  • 1.1 Product Overview and Scope
  • 1.2 Market Estimation Caveats and Base Year
  • 1.3 Market Analysis by Type
    • 1.3.1 Overview: Global Semiconductor Gas Abatement Systems Consumption Value by Type: 2021 Versus 2025 Versus 2032
    • 1.3.2 Combustion-wash Type
    • 1.3.3 Dry Type
    • 1.3.4 Catalytic Type
    • 1.3.5 Wet Type
    • 1.3.6 Plasma-wet Type
    • 1.3.7 Others
  • 1.4 Market Analysis by Application
    • 1.4.1 Overview: Global Semiconductor Gas Abatement Systems Consumption Value by Application: 2021 Versus 2025 Versus 2032
    • 1.4.2 Plasma Etching
    • 1.4.3 CVD and ALD
    • 1.4.4 EPI
    • 1.4.5 Ion Implantation
    • 1.4.6 Others
  • 1.5 Global Semiconductor Gas Abatement Systems Market Size & Forecast
    • 1.5.1 Global Semiconductor Gas Abatement Systems Consumption Value (2021 & 2025 & 2032)
    • 1.5.2 Global Semiconductor Gas Abatement Systems Sales Quantity (2021-2032)
    • 1.5.3 Global Semiconductor Gas Abatement Systems Average Price (2021-2032)

2 Manufacturers Profiles

  • 2.1 Ebara
    • 2.1.1 Ebara Details
    • 2.1.2 Ebara Major Business
    • 2.1.3 Ebara Semiconductor Gas Abatement Systems Product and Services
    • 2.1.4 Ebara Semiconductor Gas Abatement Systems Sales Quantity, Average Price, Revenue, Gross Margin and Market Share (2021-2026)
    • 2.1.5 Ebara Recent Developments/Updates
  • 2.2 Atlas Copco (Edwards and CSK brands)
    • 2.2.1 Atlas Copco (Edwards and CSK brands) Details
    • 2.2.2 Atlas Copco (Edwards and CSK brands) Major Business
    • 2.2.3 Atlas Copco (Edwards and CSK brands) Semiconductor Gas Abatement Systems Product and Services
    • 2.2.4 Atlas Copco (Edwards and CSK brands) Semiconductor Gas Abatement Systems Sales Quantity, Average Price, Revenue, Gross Margin and Market Share (2021-2026)
    • 2.2.5 Atlas Copco (Edwards and CSK brands) Recent Developments/Updates
  • 2.3 GST (Global Standard Technology)
    • 2.3.1 GST (Global Standard Technology) Details
    • 2.3.2 GST (Global Standard Technology) Major Business
    • 2.3.3 GST (Global Standard Technology) Semiconductor Gas Abatement Systems Product and Services
    • 2.3.4 GST (Global Standard Technology) Semiconductor Gas Abatement Systems Sales Quantity, Average Price, Revenue, Gross Margin and Market Share (2021-2026)
    • 2.3.5 GST (Global Standard Technology) Recent Developments/Updates
  • 2.4 Shanghai Shengjian Technology
    • 2.4.1 Shanghai Shengjian Technology Details
    • 2.4.2 Shanghai Shengjian Technology Major Business
    • 2.4.3 Shanghai Shengjian Technology Semiconductor Gas Abatement Systems Product and Services
    • 2.4.4 Shanghai Shengjian Technology Semiconductor Gas Abatement Systems Sales Quantity, Average Price, Revenue, Gross Margin and Market Share (2021-2026)
    • 2.4.5 Shanghai Shengjian Technology Recent Developments/Updates
  • 2.5 Busch Group
    • 2.5.1 Busch Group Details
    • 2.5.2 Busch Group Major Business
    • 2.5.3 Busch Group Semiconductor Gas Abatement Systems Product and Services
    • 2.5.4 Busch Group Semiconductor Gas Abatement Systems Sales Quantity, Average Price, Revenue, Gross Margin and Market Share (2021-2026)
    • 2.5.5 Busch Group Recent Developments/Updates
  • 2.6 DAS Environmental Expert
    • 2.6.1 DAS Environmental Expert Details
    • 2.6.2 DAS Environmental Expert Major Business
    • 2.6.3 DAS Environmental Expert Semiconductor Gas Abatement Systems Product and Services
    • 2.6.4 DAS Environmental Expert Semiconductor Gas Abatement Systems Sales Quantity, Average Price, Revenue, Gross Margin and Market Share (2021-2026)
    • 2.6.5 DAS Environmental Expert Recent Developments/Updates
  • 2.7 CS Clean Solutions
    • 2.7.1 CS Clean Solutions Details
    • 2.7.2 CS Clean Solutions Major Business
    • 2.7.3 CS Clean Solutions Semiconductor Gas Abatement Systems Product and Services
    • 2.7.4 CS Clean Solutions Semiconductor Gas Abatement Systems Sales Quantity, Average Price, Revenue, Gross Margin and Market Share (2021-2026)
    • 2.7.5 CS Clean Solutions Recent Developments/Updates
  • 2.8 Kanken Techno
    • 2.8.1 Kanken Techno Details
    • 2.8.2 Kanken Techno Major Business
    • 2.8.3 Kanken Techno Semiconductor Gas Abatement Systems Product and Services
    • 2.8.4 Kanken Techno Semiconductor Gas Abatement Systems Sales Quantity, Average Price, Revenue, Gross Margin and Market Share (2021-2026)
    • 2.8.5 Kanken Techno Recent Developments/Updates
  • 2.9 Beijing Jingyi Automation Equipment
    • 2.9.1 Beijing Jingyi Automation Equipment Details
    • 2.9.2 Beijing Jingyi Automation Equipment Major Business
    • 2.9.3 Beijing Jingyi Automation Equipment Semiconductor Gas Abatement Systems Product and Services
    • 2.9.4 Beijing Jingyi Automation Equipment Semiconductor Gas Abatement Systems Sales Quantity, Average Price, Revenue, Gross Margin and Market Share (2021-2026)
    • 2.9.5 Beijing Jingyi Automation Equipment Recent Developments/Updates
  • 2.10 Unisem
    • 2.10.1 Unisem Details
    • 2.10.2 Unisem Major Business
    • 2.10.3 Unisem Semiconductor Gas Abatement Systems Product and Services
    • 2.10.4 Unisem Semiconductor Gas Abatement Systems Sales Quantity, Average Price, Revenue, Gross Margin and Market Share (2021-2026)
    • 2.10.5 Unisem Recent Developments/Updates
  • 2.11 Ecosys Abatement
    • 2.11.1 Ecosys Abatement Details
    • 2.11.2 Ecosys Abatement Major Business
    • 2.11.3 Ecosys Abatement Semiconductor Gas Abatement Systems Product and Services
    • 2.11.4 Ecosys Abatement Semiconductor Gas Abatement Systems Sales Quantity, Average Price, Revenue, Gross Margin and Market Share (2021-2026)
    • 2.11.5 Ecosys Abatement Recent Developments/Updates
  • 2.12 CECO Environmental
    • 2.12.1 CECO Environmental Details
    • 2.12.2 CECO Environmental Major Business
    • 2.12.3 CECO Environmental Semiconductor Gas Abatement Systems Product and Services
    • 2.12.4 CECO Environmental Semiconductor Gas Abatement Systems Sales Quantity, Average Price, Revenue, Gross Margin and Market Share (2021-2026)
    • 2.12.5 CECO Environmental Recent Developments/Updates
  • 2.13 Highvac
    • 2.13.1 Highvac Details
    • 2.13.2 Highvac Major Business
    • 2.13.3 Highvac Semiconductor Gas Abatement Systems Product and Services
    • 2.13.4 Highvac Semiconductor Gas Abatement Systems Sales Quantity, Average Price, Revenue, Gross Margin and Market Share (2021-2026)
    • 2.13.5 Highvac Recent Developments/Updates
  • 2.14 Nippon Sanso (Mitsubishi Chemical)
    • 2.14.1 Nippon Sanso (Mitsubishi Chemical) Details
    • 2.14.2 Nippon Sanso (Mitsubishi Chemical) Major Business
    • 2.14.3 Nippon Sanso (Mitsubishi Chemical) Semiconductor Gas Abatement Systems Product and Services
    • 2.14.4 Nippon Sanso (Mitsubishi Chemical) Semiconductor Gas Abatement Systems Sales Quantity, Average Price, Revenue, Gross Margin and Market Share (2021-2026)
    • 2.14.5 Nippon Sanso (Mitsubishi Chemical) Recent Developments/Updates
  • 2.15 Anguil Environmental Systems
    • 2.15.1 Anguil Environmental Systems Details
    • 2.15.2 Anguil Environmental Systems Major Business
    • 2.15.3 Anguil Environmental Systems Semiconductor Gas Abatement Systems Product and Services
    • 2.15.4 Anguil Environmental Systems Semiconductor Gas Abatement Systems Sales Quantity, Average Price, Revenue, Gross Margin and Market Share (2021-2026)
    • 2.15.5 Anguil Environmental Systems Recent Developments/Updates
  • 2.16 Resonac (formerly Showa Denko)
    • 2.16.1 Resonac (formerly Showa Denko) Details
    • 2.16.2 Resonac (formerly Showa Denko) Major Business
    • 2.16.3 Resonac (formerly Showa Denko) Semiconductor Gas Abatement Systems Product and Services
    • 2.16.4 Resonac (formerly Showa Denko) Semiconductor Gas Abatement Systems Sales Quantity, Average Price, Revenue, Gross Margin and Market Share (2021-2026)
    • 2.16.5 Resonac (formerly Showa Denko) Recent Developments/Updates

3 Competitive Environment: Semiconductor Gas Abatement Systems by Manufacturer

  • 3.1 Global Semiconductor Gas Abatement Systems Sales Quantity by Manufacturer (2021-2026)
  • 3.2 Global Semiconductor Gas Abatement Systems Revenue by Manufacturer (2021-2026)
  • 3.3 Global Semiconductor Gas Abatement Systems Average Price by Manufacturer (2021-2026)
  • 3.4 Market Share Analysis (2025)
    • 3.4.1 Producer Shipments of Semiconductor Gas Abatement Systems by Manufacturer Revenue ($MM) and Market Share (%): 2025
    • 3.4.2 Top 3 Semiconductor Gas Abatement Systems Manufacturer Market Share in 2025
    • 3.4.3 Top 6 Semiconductor Gas Abatement Systems Manufacturer Market Share in 2025
  • 3.5 Semiconductor Gas Abatement Systems Market: Overall Company Footprint Analysis
    • 3.5.1 Semiconductor Gas Abatement Systems Market: Region Footprint
    • 3.5.2 Semiconductor Gas Abatement Systems Market: Company Product Type Footprint
    • 3.5.3 Semiconductor Gas Abatement Systems Market: Company Product Application Footprint
  • 3.6 New Market Entrants and Barriers to Market Entry
  • 3.7 Mergers, Acquisition, Agreements, and Collaborations

4 Consumption Analysis by Region

  • 4.1 Global Semiconductor Gas Abatement Systems Market Size by Region
    • 4.1.1 Global Semiconductor Gas Abatement Systems Sales Quantity by Region (2021-2032)
    • 4.1.2 Global Semiconductor Gas Abatement Systems Consumption Value by Region (2021-2032)
    • 4.1.3 Global Semiconductor Gas Abatement Systems Average Price by Region (2021-2032)
  • 4.2 North America Semiconductor Gas Abatement Systems Consumption Value (2021-2032)
  • 4.3 Europe Semiconductor Gas Abatement Systems Consumption Value (2021-2032)
  • 4.4 Asia-Pacific Semiconductor Gas Abatement Systems Consumption Value (2021-2032)
  • 4.5 South America Semiconductor Gas Abatement Systems Consumption Value (2021-2032)
  • 4.6 Middle East & Africa Semiconductor Gas Abatement Systems Consumption Value (2021-2032)

5 Market Segment by Type

  • 5.1 Global Semiconductor Gas Abatement Systems Sales Quantity by Type (2021-2032)
  • 5.2 Global Semiconductor Gas Abatement Systems Consumption Value by Type (2021-2032)
  • 5.3 Global Semiconductor Gas Abatement Systems Average Price by Type (2021-2032)

6 Market Segment by Application

  • 6.1 Global Semiconductor Gas Abatement Systems Sales Quantity by Application (2021-2032)
  • 6.2 Global Semiconductor Gas Abatement Systems Consumption Value by Application (2021-2032)
  • 6.3 Global Semiconductor Gas Abatement Systems Average Price by Application (2021-2032)

7 North America

  • 7.1 North America Semiconductor Gas Abatement Systems Sales Quantity by Type (2021-2032)
  • 7.2 North America Semiconductor Gas Abatement Systems Sales Quantity by Application (2021-2032)
  • 7.3 North America Semiconductor Gas Abatement Systems Market Size by Country
    • 7.3.1 North America Semiconductor Gas Abatement Systems Sales Quantity by Country (2021-2032)
    • 7.3.2 North America Semiconductor Gas Abatement Systems Consumption Value by Country (2021-2032)
    • 7.3.3 United States Market Size and Forecast (2021-2032)
    • 7.3.4 Canada Market Size and Forecast (2021-2032)
    • 7.3.5 Mexico Market Size and Forecast (2021-2032)

8 Europe

  • 8.1 Europe Semiconductor Gas Abatement Systems Sales Quantity by Type (2021-2032)
  • 8.2 Europe Semiconductor Gas Abatement Systems Sales Quantity by Application (2021-2032)
  • 8.3 Europe Semiconductor Gas Abatement Systems Market Size by Country
    • 8.3.1 Europe Semiconductor Gas Abatement Systems Sales Quantity by Country (2021-2032)
    • 8.3.2 Europe Semiconductor Gas Abatement Systems Consumption Value by Country (2021-2032)
    • 8.3.3 Germany Market Size and Forecast (2021-2032)
    • 8.3.4 France Market Size and Forecast (2021-2032)
    • 8.3.5 United Kingdom Market Size and Forecast (2021-2032)
    • 8.3.6 Russia Market Size and Forecast (2021-2032)
    • 8.3.7 Italy Market Size and Forecast (2021-2032)

9 Asia-Pacific

  • 9.1 Asia-Pacific Semiconductor Gas Abatement Systems Sales Quantity by Type (2021-2032)
  • 9.2 Asia-Pacific Semiconductor Gas Abatement Systems Sales Quantity by Application (2021-2032)
  • 9.3 Asia-Pacific Semiconductor Gas Abatement Systems Market Size by Region
    • 9.3.1 Asia-Pacific Semiconductor Gas Abatement Systems Sales Quantity by Region (2021-2032)
    • 9.3.2 Asia-Pacific Semiconductor Gas Abatement Systems Consumption Value by Region (2021-2032)
    • 9.3.3 China Market Size and Forecast (2021-2032)
    • 9.3.4 Japan Market Size and Forecast (2021-2032)
    • 9.3.5 South Korea Market Size and Forecast (2021-2032)
    • 9.3.6 India Market Size and Forecast (2021-2032)
    • 9.3.7 Southeast Asia Market Size and Forecast (2021-2032)
    • 9.3.8 Australia Market Size and Forecast (2021-2032)

10 South America

  • 10.1 South America Semiconductor Gas Abatement Systems Sales Quantity by Type (2021-2032)
  • 10.2 South America Semiconductor Gas Abatement Systems Sales Quantity by Application (2021-2032)
  • 10.3 South America Semiconductor Gas Abatement Systems Market Size by Country
    • 10.3.1 South America Semiconductor Gas Abatement Systems Sales Quantity by Country (2021-2032)
    • 10.3.2 South America Semiconductor Gas Abatement Systems Consumption Value by Country (2021-2032)
    • 10.3.3 Brazil Market Size and Forecast (2021-2032)
    • 10.3.4 Argentina Market Size and Forecast (2021-2032)

11 Middle East & Africa

  • 11.1 Middle East & Africa Semiconductor Gas Abatement Systems Sales Quantity by Type (2021-2032)
  • 11.2 Middle East & Africa Semiconductor Gas Abatement Systems Sales Quantity by Application (2021-2032)
  • 11.3 Middle East & Africa Semiconductor Gas Abatement Systems Market Size by Country
    • 11.3.1 Middle East & Africa Semiconductor Gas Abatement Systems Sales Quantity by Country (2021-2032)
    • 11.3.2 Middle East & Africa Semiconductor Gas Abatement Systems Consumption Value by Country (2021-2032)
    • 11.3.3 Turkey Market Size and Forecast (2021-2032)
    • 11.3.4 Egypt Market Size and Forecast (2021-2032)
    • 11.3.5 Saudi Arabia Market Size and Forecast (2021-2032)
    • 11.3.6 South Africa Market Size and Forecast (2021-2032)

12 Market Dynamics

  • 12.1 Semiconductor Gas Abatement Systems Market Drivers
  • 12.2 Semiconductor Gas Abatement Systems Market Restraints
  • 12.3 Semiconductor Gas Abatement Systems Trends Analysis
  • 12.4 Porters Five Forces Analysis
    • 12.4.1 Threat of New Entrants
    • 12.4.2 Bargaining Power of Suppliers
    • 12.4.3 Bargaining Power of Buyers
    • 12.4.4 Threat of Substitutes
    • 12.4.5 Competitive Rivalry

13 Raw Material and Industry Chain

  • 13.1 Raw Material of Semiconductor Gas Abatement Systems and Key Manufacturers
  • 13.2 Manufacturing Costs Percentage of Semiconductor Gas Abatement Systems
  • 13.3 Semiconductor Gas Abatement Systems Production Process
  • 13.4 Industry Value Chain Analysis

14 Shipments by Distribution Channel

  • 14.1 Sales Channel
    • 14.1.1 Direct to End-User
    • 14.1.2 Distributors
  • 14.2 Semiconductor Gas Abatement Systems Typical Distributors
  • 14.3 Semiconductor Gas Abatement Systems Typical Customers

15 Research Findings and Conclusion

    16 Appendix

    • 16.1 Methodology
    • 16.2 Research Process and Data Source

    According to our (Global Info Research) latest study, the global Semiconductor Gas Abatement Systems market size was valued at US$ 1700 million in 2025 and is forecast to a readjusted size of US$ 3261 million by 2032 with a CAGR of 9.9% during review period.
    The semiconductor industry uses gases that are toxic, flammable and even harmful for the environment, but also for humans. For example, in the production of microchips. According to national legislation, these gases have to be abated. This means that they are reduced below the respective threshold limit value (TLV). Different gases require different treatment technologies, such as thermal, wet or even a combination of both technologies. The process exhaust gases can then be released into the atmosphere, without harming nature, for a greener world.
    Governments and regulatory bodies worldwide are imposing stricter regulations concerning emissions from semiconductor manufacturing. This trend is driving investments in advanced gas abatement technologies to ensure compliance and reduce environmental risks.
    This report is a detailed and comprehensive analysis for global Semiconductor Gas Abatement Systems market. Both quantitative and qualitative analyses are presented by manufacturers, by region & country, by Type and by Application. As the market is constantly changing, this report explores the competition, supply and demand trends, as well as key factors that contribute to its changing demands across many markets. Company profiles and product examples of selected competitors, along with market share estimates of some of the selected leaders for the year 2025, are provided.
    Key Features:
    Global Semiconductor Gas Abatement Systems market size and forecasts, in consumption value ($ Million), sales quantity (Units), and average selling prices (US$/Unit), 2021-2032
    Global Semiconductor Gas Abatement Systems market size and forecasts by region and country, in consumption value ($ Million), sales quantity (Units), and average selling prices (US$/Unit), 2021-2032
    Global Semiconductor Gas Abatement Systems market size and forecasts, by Type and by Application, in consumption value ($ Million), sales quantity (Units), and average selling prices (US$/Unit), 2021-2032
    Global Semiconductor Gas Abatement Systems market shares of main players, shipments in revenue ($ Million), sales quantity (Units), and ASP (US$/Unit), 2021-2026
    The Primary Objectives in This Report Are:
    To determine the size of the total market opportunity of global and key countries
    To assess the growth potential for Semiconductor Gas Abatement Systems
    To forecast future growth in each product and end-use market
    To assess competitive factors affecting the marketplace
    This report profiles key players in the global Semiconductor Gas Abatement Systems market based on the following parameters - company overview, sales quantity, revenue, price, gross margin, product portfolio, geographical presence, and key developments. Key companies covered as a part of this study include Ebara, Atlas Copco (Edwards and CSK brands), GST (Global Standard Technology), Shanghai Shengjian Technology, Busch Group, DAS Environmental Expert, CS Clean Solutions, Kanken Techno, Beijing Jingyi Automation Equipment, Unisem, etc.
    This report also provides key insights about market drivers, restraints, opportunities, new product launches or approvals.
    Market Segmentation
    Semiconductor Gas Abatement Systems market is split by Type and by Application. For the period 2021-2032, the growth among segments provides accurate calculations and forecasts for consumption value by Type, and by Application in terms of volume and value. This analysis can help you expand your business by targeting qualified niche markets.
    Market segment by Type
    Combustion-wash Type
    Dry Type
    Catalytic Type
    Wet Type
    Plasma-wet Type
    Others
    Market segment by Application
    Plasma Etching
    CVD and ALD
    EPI
    Ion Implantation
    Others
    Major players covered
    Ebara
    Atlas Copco (Edwards and CSK brands)
    GST (Global Standard Technology)
    Shanghai Shengjian Technology
    Busch Group
    DAS Environmental Expert
    CS Clean Solutions
    Kanken Techno
    Beijing Jingyi Automation Equipment
    Unisem
    Ecosys Abatement
    CECO Environmental
    Highvac
    Nippon Sanso (Mitsubishi Chemical)
    Anguil Environmental Systems
    Resonac (formerly Showa Denko)
    Market segment by region, regional analysis covers
    North America (United States, Canada, and Mexico)
    Europe (Germany, France, United Kingdom, Russia, Italy, and Rest of Europe)
    Asia-Pacific (China, Japan, Korea, India, Southeast Asia, and Australia)
    South America (Brazil, Argentina, Colombia, and Rest of South America)
    Middle East & Africa (Saudi Arabia, UAE, Egypt, South Africa, and Rest of Middle East & Africa)
    The content of the study subjects, includes a total of 15 chapters:
    Chapter 1, to describe Semiconductor Gas Abatement Systems product scope, market overview, market estimation caveats and base year.
    Chapter 2, to profile the top manufacturers of Semiconductor Gas Abatement Systems, with price, sales quantity, revenue, and global market share of Semiconductor Gas Abatement Systems from 2021 to 2026.
    Chapter 3, the Semiconductor Gas Abatement Systems competitive situation, sales quantity, revenue, and global market share of top manufacturers are analyzed emphatically by landscape contrast.
    Chapter 4, the Semiconductor Gas Abatement Systems breakdown data are shown at the regional level, to show the sales quantity, consumption value, and growth by regions, from 2021 to 2032.
    Chapter 5 and 6, to segment the sales by Type and by Application, with sales market share and growth rate by Type, by Application, from 2021 to 2032.
    Chapter 7, 8, 9, 10 and 11, to break the sales data at the country level, with sales quantity, consumption value, and market share for key countries in the world, from 2021 to 2026.and Semiconductor Gas Abatement Systems market forecast, by regions, by Type, and by Application, with sales and revenue, from 2027 to 2032.
    Chapter 12, market dynamics, drivers, restraints, trends, and Porters Five Forces analysis.
    Chapter 13, the key raw materials and key suppliers, and industry chain of Semiconductor Gas Abatement Systems.
    Chapter 14 and 15, to describe Semiconductor Gas Abatement Systems sales channel, distributors, customers, research findings and conclusion.

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