1 Supply Summary

• 1.1 Mask Defect Inspection Equipment Introduction
• 1.2 World Mask Defect Inspection Equipment Supply & Forecast
  • 1.2.1 World Mask Defect Inspection Equipment Production Value (2021 & 2025 & 2032)
  • 1.2.2 World Mask Defect Inspection Equipment Production (2021-2032)
  • 1.2.3 World Mask Defect Inspection Equipment Pricing Trends (2021-2032)
• 1.3 World Mask Defect Inspection Equipment Production by Region (Based on Production Site)
  • 1.3.1 World Mask Defect Inspection Equipment Production Value by Region (2021-2032)
  • 1.3.2 World Mask Defect Inspection Equipment Production by Region (2021-2032)
  • 1.3.3 World Mask Defect Inspection Equipment Average Price by Region (2021-2032)
  • 1.3.4 North America Mask Defect Inspection Equipment Production (2021-2032)
  • 1.3.5 Europe Mask Defect Inspection Equipment Production (2021-2032)
  • 1.3.6 Japan Mask Defect Inspection Equipment Production (2021-2032)
  • 1.3.7 China Mask Defect Inspection Equipment Production (2021-2032)
• 1.4 Market Drivers, Restraints and Trends
  • 1.4.1 Mask Defect Inspection Equipment Market Drivers
  • 1.4.2 Factors Affecting Demand
  • 1.4.3 Mask Defect Inspection Equipment Major Market Trends

2 Demand Summary

• 2.1 World Mask Defect Inspection Equipment Demand (2021-2032)
• 2.2 World Mask Defect Inspection Equipment Consumption by Region
  • 2.2.1 World Mask Defect Inspection Equipment Consumption by Region (2021-2026)
  • 2.2.2 World Mask Defect Inspection Equipment Consumption Forecast by Region (2027-2032)
• 2.3 United States Mask Defect Inspection Equipment Consumption (2021-2032)
• 2.4 China Mask Defect Inspection Equipment Consumption (2021-2032)
• 2.5 Europe Mask Defect Inspection Equipment Consumption (2021-2032)
• 2.6 Japan Mask Defect Inspection Equipment Consumption (2021-2032)
• 2.7 South Korea Mask Defect Inspection Equipment Consumption (2021-2032)
• 2.8 ASEAN Mask Defect Inspection Equipment Consumption (2021-2032)
• 2.9 India Mask Defect Inspection Equipment Consumption (2021-2032)

3 World Manufacturers Competitive Analysis

• 3.1 World Mask Defect Inspection Equipment Production Value by Manufacturer (2021-2026)
• 3.2 World Mask Defect Inspection Equipment Production by Manufacturer (2021-2026)
• 3.3 World Mask Defect Inspection Equipment Average Price by Manufacturer (2021-2026)
• 3.4 Mask Defect Inspection Equipment Company Evaluation Quadrant
• 3.5 Industry Rank and Concentration Rate (CR)
  • 3.5.1 Global Mask Defect Inspection Equipment Industry Rank of Major Manufacturers
  • 3.5.2 Global Concentration Ratios (CR4) for Mask Defect Inspection Equipment in 2025
  • 3.5.3 Global Concentration Ratios (CR8) for Mask Defect Inspection Equipment in 2025
• 3.6 Mask Defect Inspection Equipment Market: Overall Company Footprint Analysis
  • 3.6.1 Mask Defect Inspection Equipment Market: Region Footprint
  • 3.6.2 Mask Defect Inspection Equipment Market: Company Product Type Footprint
  • 3.6.3 Mask Defect Inspection Equipment Market: Company Product Application Footprint
• 3.7 Competitive Environment
  • 3.7.1 Historical Structure of the Industry
  • 3.7.2 Barriers of Market Entry
  • 3.7.3 Factors of Competition
• 3.8 New Entrant and Capacity Expansion Plans
• 3.9 Mergers, Acquisition, Agreements, and Collaborations

4 United States VS China VS Rest of the World

• 4.1 United States VS China: Mask Defect Inspection Equipment Production Value Comparison
  • 4.1.1 United States VS China: Mask Defect Inspection Equipment Production Value Comparison (2021 & 2025 & 2032)
  • 4.1.2 United States VS China: Mask Defect Inspection Equipment Production Value Market Share Comparison (2021 & 2025 & 2032)
• 4.2 United States VS China: Mask Defect Inspection Equipment Production Comparison
  • 4.2.1 United States VS China: Mask Defect Inspection Equipment Production Comparison (2021 & 2025 & 2032)
  • 4.2.2 United States VS China: Mask Defect Inspection Equipment Production Market Share Comparison (2021 & 2025 & 2032)
• 4.3 United States VS China: Mask Defect Inspection Equipment Consumption Comparison
  • 4.3.1 United States VS China: Mask Defect Inspection Equipment Consumption Comparison (2021 & 2025 & 2032)
  • 4.3.2 United States VS China: Mask Defect Inspection Equipment Consumption Market Share Comparison (2021 & 2025 & 2032)
• 4.4 United States Based Mask Defect Inspection Equipment Manufacturers and Market Share, 2021-2026
  • 4.4.1 United States Based Mask Defect Inspection Equipment Manufacturers, Headquarters and Production Site (States, Country)
  • 4.4.2 United States Based Manufacturers Mask Defect Inspection Equipment Production Value (2021-2026)
  • 4.4.3 United States Based Manufacturers Mask Defect Inspection Equipment Production (2021-2026)
• 4.5 China Based Mask Defect Inspection Equipment Manufacturers and Market Share
  • 4.5.1 China Based Mask Defect Inspection Equipment Manufacturers, Headquarters and Production Site (Province, Country)
  • 4.5.2 China Based Manufacturers Mask Defect Inspection Equipment Production Value (2021-2026)
  • 4.5.3 China Based Manufacturers Mask Defect Inspection Equipment Production (2021-2026)
• 4.6 Rest of World Based Mask Defect Inspection Equipment Manufacturers and Market Share, 2021-2026
  • 4.6.1 Rest of World Based Mask Defect Inspection Equipment Manufacturers, Headquarters and Production Site (State, Country)
  • 4.6.2 Rest of World Based Manufacturers Mask Defect Inspection Equipment Production Value (2021-2026)
  • 4.6.3 Rest of World Based Manufacturers Mask Defect Inspection Equipment Production (2021-2026)

5 Market Analysis by Type

• 5.1 World Mask Defect Inspection Equipment Market Size Overview by Type: 2021 VS 2025 VS 2032
• 5.2 Segment Introduction by Type
  • 5.2.1 Photomask Inspection Equipment
  • 5.2.2 Photomask Substrate Inspection Equipment
• 5.3 Market Segment by Type
  • 5.3.1 World Mask Defect Inspection Equipment Production by Type (2021-2032)
  • 5.3.2 World Mask Defect Inspection Equipment Production Value by Type (2021-2032)
  • 5.3.3 World Mask Defect Inspection Equipment Average Price by Type (2021-2032)

6 Market Analysis by Application

• 6.1 World Mask Defect Inspection Equipment Market Size Overview by Application: 2021 VS 2025 VS 2032
• 6.2 Segment Introduction by Application
  • 6.2.1 Semiconductor IC and Chip Manufacturer
  • 6.2.2 Photomask Factory
  • 6.2.3 Substrate Manufacturer
• 6.3 Market Segment by Application
  • 6.3.1 World Mask Defect Inspection Equipment Production by Application (2021-2032)
  • 6.3.2 World Mask Defect Inspection Equipment Production Value by Application (2021-2032)
  • 6.3.3 World Mask Defect Inspection Equipment Average Price by Application (2021-2032)

7 Company Profiles

• 7.1 KLA-Tencor
  • 7.1.1 KLA-Tencor Details
  • 7.1.2 KLA-Tencor Major Business
  • 7.1.3 KLA-Tencor Mask Defect Inspection Equipment Product and Services
  • 7.1.4 KLA-Tencor Mask Defect Inspection Equipment Production, Price, Value, Gross Margin and Market Share (2021-2026)
  • 7.1.5 KLA-Tencor Recent Developments/Updates
  • 7.1.6 KLA-Tencor Competitive Strengths & Weaknesses
• 7.2 Applied Materials
  • 7.2.1 Applied Materials Details
  • 7.2.2 Applied Materials Major Business
  • 7.2.3 Applied Materials Mask Defect Inspection Equipment Product and Services
  • 7.2.4 Applied Materials Mask Defect Inspection Equipment Production, Price, Value, Gross Margin and Market Share (2021-2026)
  • 7.2.5 Applied Materials Recent Developments/Updates
  • 7.2.6 Applied Materials Competitive Strengths & Weaknesses
• 7.3 Lasertec
  • 7.3.1 Lasertec Details
  • 7.3.2 Lasertec Major Business
  • 7.3.3 Lasertec Mask Defect Inspection Equipment Product and Services
  • 7.3.4 Lasertec Mask Defect Inspection Equipment Production, Price, Value, Gross Margin and Market Share (2021-2026)
  • 7.3.5 Lasertec Recent Developments/Updates
  • 7.3.6 Lasertec Competitive Strengths & Weaknesses
• 7.4 NuFlare
  • 7.4.1 NuFlare Details
  • 7.4.2 NuFlare Major Business
  • 7.4.3 NuFlare Mask Defect Inspection Equipment Product and Services
  • 7.4.4 NuFlare Mask Defect Inspection Equipment Production, Price, Value, Gross Margin and Market Share (2021-2026)
  • 7.4.5 NuFlare Recent Developments/Updates
  • 7.4.6 NuFlare Competitive Strengths & Weaknesses
• 7.5 Carl Zeiss AG
  • 7.5.1 Carl Zeiss AG Details
  • 7.5.2 Carl Zeiss AG Major Business
  • 7.5.3 Carl Zeiss AG Mask Defect Inspection Equipment Product and Services
  • 7.5.4 Carl Zeiss AG Mask Defect Inspection Equipment Production, Price, Value, Gross Margin and Market Share (2021-2026)
  • 7.5.5 Carl Zeiss AG Recent Developments/Updates
  • 7.5.6 Carl Zeiss AG Competitive Strengths & Weaknesses
• 7.6 Advantest
  • 7.6.1 Advantest Details
  • 7.6.2 Advantest Major Business
  • 7.6.3 Advantest Mask Defect Inspection Equipment Product and Services
  • 7.6.4 Advantest Mask Defect Inspection Equipment Production, Price, Value, Gross Margin and Market Share (2021-2026)
  • 7.6.5 Advantest Recent Developments/Updates
  • 7.6.6 Advantest Competitive Strengths & Weaknesses
• 7.7 VPTEK
  • 7.7.1 VPTEK Details
  • 7.7.2 VPTEK Major Business
  • 7.7.3 VPTEK Mask Defect Inspection Equipment Product and Services
  • 7.7.4 VPTEK Mask Defect Inspection Equipment Production, Price, Value, Gross Margin and Market Share (2021-2026)
  • 7.7.5 VPTEK Recent Developments/Updates
  • 7.7.6 VPTEK Competitive Strengths & Weaknesses
• 7.8 YUWEITEK
  • 7.8.1 YUWEITEK Details
  • 7.8.2 YUWEITEK Major Business
  • 7.8.3 YUWEITEK Mask Defect Inspection Equipment Product and Services
  • 7.8.4 YUWEITEK Mask Defect Inspection Equipment Production, Price, Value, Gross Margin and Market Share (2021-2026)
  • 7.8.5 YUWEITEK Recent Developments/Updates
  • 7.8.6 YUWEITEK Competitive Strengths & Weaknesses

8 Industry Chain Analysis

• 8.1 Mask Defect Inspection Equipment Industry Chain
• 8.2 Mask Defect Inspection Equipment Upstream Analysis
  • 8.2.1 Mask Defect Inspection Equipment Core Raw Materials
  • 8.2.2 Main Manufacturers of Mask Defect Inspection Equipment Core Raw Materials
• 8.3 Midstream Analysis
• 8.4 Downstream Analysis
• 8.5 Mask Defect Inspection Equipment Production Mode
• 8.6 Mask Defect Inspection Equipment Procurement Model
• 8.7 Mask Defect Inspection Equipment Industry Sales Model and Sales Channels
  • 8.7.1 Mask Defect Inspection Equipment Sales Model
  • 8.7.2 Mask Defect Inspection Equipment Typical Distributors

9 Research Findings and Conclusion

10 Appendix

• 10.1 Methodology
• 10.2 Research Process and Data Source

The global Mask Defect Inspection Equipment market size is expected to reach $ 3750 million by 2032, rising at a market growth of 9.2% CAGR during the forecast period (2026-2032).
Mask Defect Inspection Equipment is a pattern master used in photolithography in microelectronics manufacturing. An opaque light-shielding film is used to form a mask pattern on a transparent substrate, and the pattern is transferred to the product substrate through exposure.
Market Growth Drivers
Semiconductor Industry Expansion: Accelerated construction of new wafer fabs globally (28 new plants in 2023, including 20 in mainland China), driving the CAGR of photomask demand to 11.77%.
Localization Acceleration: Current domestic production rate of high-end photomasks remains below 20%, with policy support speeding up local capacity expansion (e.g., SPPI's 130-28nm production line to commence in 2025).
Technology Evolution: EUV lithography and advanced packaging (Chiplet/3D IC) require defect density at nanoscale, forcing inspection equipment upgrades.
Technology Trends
High-Resolution Inspection: Rising adoption of E-beam and X-ray systems for sub-3nm defect detection.
AI Integration: AI algorithms enable 30%+ efficiency gains in defect classification and localization (e.g., KLA-Tencor solutions).
Hybrid Modalities: Optical+E-beam hybrid systems dominate for balanced speed/accuracy (e.g., Lasertec's latest models)46.
Emerging Applications
Micro-LED: Mass transfer processes demand photomask defect rates <0.1ppm, spurring new equipment needs.
Automotive Electronics: AEC-Q100 certification elevates inspection standards, requiring high-temp/high-pressure testing capabilities.
This report studies the global Mask Defect Inspection Equipment production, demand, key manufacturers, and key regions.
This report is a detailed and comprehensive analysis of the world market for Mask Defect Inspection Equipment and provides market size (US$ million) and Year-over-Year (YoY) Growth, considering 2025 as the base year. This report explores demand trends and competition, as well as details the characteristics of Mask Defect Inspection Equipment that contribute to its increasing demand across many markets.
Highlights and key features of the study
Global Mask Defect Inspection Equipment total production and demand, 2021-2032, (Units)
Global Mask Defect Inspection Equipment total production value, 2021-2032, (USD Million)
Global Mask Defect Inspection Equipment production by region & country, production, value, CAGR, 2021-2032, (USD Million) & (Units), (based on production site)
Global Mask Defect Inspection Equipment consumption by region & country, CAGR, 2021-2032 & (Units)
U.S. VS China: Mask Defect Inspection Equipment domestic production, consumption, key domestic manufacturers and share
Global Mask Defect Inspection Equipment production by manufacturer, production, price, value and market share 2021-2026, (USD Million) & (Units)
Global Mask Defect Inspection Equipment production by Type, production, value, CAGR, 2021-2032, (USD Million) & (Units)
Global Mask Defect Inspection Equipment production by Application, production, value, CAGR, 2021-2032, (USD Million) & (Units)
This report profiles key players in the global Mask Defect Inspection Equipment market based on the following parameters - company overview, production, value, price, gross margin, product portfolio, geographical presence, and key developments. Key companies covered as a part of this study include KLA-Tencor, Applied Materials, Lasertec, NuFlare, Carl Zeiss AG, Advantest, VPTEK, YUWEITEK, etc.
This report also provides key insights about market drivers, restraints, opportunities, new product launches or approvals.
Stakeholders would have ease in decision-making through various strategy matrices used in analyzing the World Mask Defect Inspection Equipment market
Detailed Segmentation:
Each section contains quantitative market data including market by value (US$ Millions), volume (production, consumption) & (Units) and average price (K US$/Unit) by manufacturer, by Type, and by Application. Data is given for the years 2021-2032 by year with 2025 as the base year, 2026 as the estimate year, and 2027-2032 as the forecast year.
Global Mask Defect Inspection Equipment Market, By Region:
United States
China
Europe
Japan
South Korea
ASEAN
India
Rest of World
Global Mask Defect Inspection Equipment Market, Segmentation by Type:
Photomask Inspection Equipment
Photomask Substrate Inspection Equipment
Global Mask Defect Inspection Equipment Market, Segmentation by Application:
Semiconductor IC and Chip Manufacturer
Photomask Factory
Substrate Manufacturer
Companies Profiled:
KLA-Tencor
Applied Materials
Lasertec
NuFlare
Carl Zeiss AG
Advantest
VPTEK
YUWEITEK
Key Questions Answered:
1. How big is the global Mask Defect Inspection Equipment market?
2. What is the demand of the global Mask Defect Inspection Equipment market?
3. What is the year over year growth of the global Mask Defect Inspection Equipment market?
4. What is the production and production value of the global Mask Defect Inspection Equipment market?
5. Who are the key producers in the global Mask Defect Inspection Equipment market?
6. What are the growth factors driving the market demand?