Copyright Reports & Markets. All rights reserved.

Global Dry Etching Equipment for Semiconductor Market 2026 by Manufacturers, Regions, Type and Application, Forecast to 2032

Request for Sample of this report
Buy now

1 Market Overview

  • 1.1 Product Overview and Scope
  • 1.2 Market Estimation Caveats and Base Year
  • 1.3 Market Analysis by Type
    • 1.3.1 Overview: Global Dry Etching Equipment for Semiconductor Consumption Value by Type: 2021 Versus 2025 Versus 2032
    • 1.3.2 Inductively Coupled Plasma (ICP)
    • 1.3.3 Capacitive Coupled Plasma (CCP)
    • 1.3.4 Reactive Ion Etching (RIE)
    • 1.3.5 Deep Reactive Ion Etching (DRIE)
    • 1.3.6 Others
  • 1.4 Market Analysis by Application
    • 1.4.1 Overview: Global Dry Etching Equipment for Semiconductor Consumption Value by Application: 2021 Versus 2025 Versus 2032
    • 1.4.2 Logic and Memory
    • 1.4.3 Power Device
    • 1.4.4 MEMS
    • 1.4.5 Others
  • 1.5 Global Dry Etching Equipment for Semiconductor Market Size & Forecast
    • 1.5.1 Global Dry Etching Equipment for Semiconductor Consumption Value (2021 & 2025 & 2032)
    • 1.5.2 Global Dry Etching Equipment for Semiconductor Sales Quantity (2021-2032)
    • 1.5.3 Global Dry Etching Equipment for Semiconductor Average Price (2021-2032)

2 Manufacturers Profiles

  • 2.1 Lam Research
    • 2.1.1 Lam Research Details
    • 2.1.2 Lam Research Major Business
    • 2.1.3 Lam Research Dry Etching Equipment for Semiconductor Product and Services
    • 2.1.4 Lam Research Dry Etching Equipment for Semiconductor Sales Quantity, Average Price, Revenue, Gross Margin and Market Share (2021-2026)
    • 2.1.5 Lam Research Recent Developments/Updates
  • 2.2 Tokyo Electron Limited
    • 2.2.1 Tokyo Electron Limited Details
    • 2.2.2 Tokyo Electron Limited Major Business
    • 2.2.3 Tokyo Electron Limited Dry Etching Equipment for Semiconductor Product and Services
    • 2.2.4 Tokyo Electron Limited Dry Etching Equipment for Semiconductor Sales Quantity, Average Price, Revenue, Gross Margin and Market Share (2021-2026)
    • 2.2.5 Tokyo Electron Limited Recent Developments/Updates
  • 2.3 Applied Materials
    • 2.3.1 Applied Materials Details
    • 2.3.2 Applied Materials Major Business
    • 2.3.3 Applied Materials Dry Etching Equipment for Semiconductor Product and Services
    • 2.3.4 Applied Materials Dry Etching Equipment for Semiconductor Sales Quantity, Average Price, Revenue, Gross Margin and Market Share (2021-2026)
    • 2.3.5 Applied Materials Recent Developments/Updates
  • 2.4 Hitachi High-Tech
    • 2.4.1 Hitachi High-Tech Details
    • 2.4.2 Hitachi High-Tech Major Business
    • 2.4.3 Hitachi High-Tech Dry Etching Equipment for Semiconductor Product and Services
    • 2.4.4 Hitachi High-Tech Dry Etching Equipment for Semiconductor Sales Quantity, Average Price, Revenue, Gross Margin and Market Share (2021-2026)
    • 2.4.5 Hitachi High-Tech Recent Developments/Updates
  • 2.5 SEMES
    • 2.5.1 SEMES Details
    • 2.5.2 SEMES Major Business
    • 2.5.3 SEMES Dry Etching Equipment for Semiconductor Product and Services
    • 2.5.4 SEMES Dry Etching Equipment for Semiconductor Sales Quantity, Average Price, Revenue, Gross Margin and Market Share (2021-2026)
    • 2.5.5 SEMES Recent Developments/Updates
  • 2.6 AMEC
    • 2.6.1 AMEC Details
    • 2.6.2 AMEC Major Business
    • 2.6.3 AMEC Dry Etching Equipment for Semiconductor Product and Services
    • 2.6.4 AMEC Dry Etching Equipment for Semiconductor Sales Quantity, Average Price, Revenue, Gross Margin and Market Share (2021-2026)
    • 2.6.5 AMEC Recent Developments/Updates
  • 2.7 NAURA
    • 2.7.1 NAURA Details
    • 2.7.2 NAURA Major Business
    • 2.7.3 NAURA Dry Etching Equipment for Semiconductor Product and Services
    • 2.7.4 NAURA Dry Etching Equipment for Semiconductor Sales Quantity, Average Price, Revenue, Gross Margin and Market Share (2021-2026)
    • 2.7.5 NAURA Recent Developments/Updates
  • 2.8 SPTS Technologies (KLA)
    • 2.8.1 SPTS Technologies (KLA) Details
    • 2.8.2 SPTS Technologies (KLA) Major Business
    • 2.8.3 SPTS Technologies (KLA) Dry Etching Equipment for Semiconductor Product and Services
    • 2.8.4 SPTS Technologies (KLA) Dry Etching Equipment for Semiconductor Sales Quantity, Average Price, Revenue, Gross Margin and Market Share (2021-2026)
    • 2.8.5 SPTS Technologies (KLA) Recent Developments/Updates
  • 2.9 Oxford Instruments
    • 2.9.1 Oxford Instruments Details
    • 2.9.2 Oxford Instruments Major Business
    • 2.9.3 Oxford Instruments Dry Etching Equipment for Semiconductor Product and Services
    • 2.9.4 Oxford Instruments Dry Etching Equipment for Semiconductor Sales Quantity, Average Price, Revenue, Gross Margin and Market Share (2021-2026)
    • 2.9.5 Oxford Instruments Recent Developments/Updates
  • 2.10 ULVAC
    • 2.10.1 ULVAC Details
    • 2.10.2 ULVAC Major Business
    • 2.10.3 ULVAC Dry Etching Equipment for Semiconductor Product and Services
    • 2.10.4 ULVAC Dry Etching Equipment for Semiconductor Sales Quantity, Average Price, Revenue, Gross Margin and Market Share (2021-2026)
    • 2.10.5 ULVAC Recent Developments/Updates
  • 2.11 Plasma-Therm
    • 2.11.1 Plasma-Therm Details
    • 2.11.2 Plasma-Therm Major Business
    • 2.11.3 Plasma-Therm Dry Etching Equipment for Semiconductor Product and Services
    • 2.11.4 Plasma-Therm Dry Etching Equipment for Semiconductor Sales Quantity, Average Price, Revenue, Gross Margin and Market Share (2021-2026)
    • 2.11.5 Plasma-Therm Recent Developments/Updates
  • 2.12 GigaLane
    • 2.12.1 GigaLane Details
    • 2.12.2 GigaLane Major Business
    • 2.12.3 GigaLane Dry Etching Equipment for Semiconductor Product and Services
    • 2.12.4 GigaLane Dry Etching Equipment for Semiconductor Sales Quantity, Average Price, Revenue, Gross Margin and Market Share (2021-2026)
    • 2.12.5 GigaLane Recent Developments/Updates
  • 2.13 VM
    • 2.13.1 VM Details
    • 2.13.2 VM Major Business
    • 2.13.3 VM Dry Etching Equipment for Semiconductor Product and Services
    • 2.13.4 VM Dry Etching Equipment for Semiconductor Sales Quantity, Average Price, Revenue, Gross Margin and Market Share (2021-2026)
    • 2.13.5 VM Recent Developments/Updates
  • 2.14 Jusung Engineering
    • 2.14.1 Jusung Engineering Details
    • 2.14.2 Jusung Engineering Major Business
    • 2.14.3 Jusung Engineering Dry Etching Equipment for Semiconductor Product and Services
    • 2.14.4 Jusung Engineering Dry Etching Equipment for Semiconductor Sales Quantity, Average Price, Revenue, Gross Margin and Market Share (2021-2026)
    • 2.14.5 Jusung Engineering Recent Developments/Updates
  • 2.15 SAMCO
    • 2.15.1 SAMCO Details
    • 2.15.2 SAMCO Major Business
    • 2.15.3 SAMCO Dry Etching Equipment for Semiconductor Product and Services
    • 2.15.4 SAMCO Dry Etching Equipment for Semiconductor Sales Quantity, Average Price, Revenue, Gross Margin and Market Share (2021-2026)
    • 2.15.5 SAMCO Recent Developments/Updates

3 Competitive Environment: Dry Etching Equipment for Semiconductor by Manufacturer

  • 3.1 Global Dry Etching Equipment for Semiconductor Sales Quantity by Manufacturer (2021-2026)
  • 3.2 Global Dry Etching Equipment for Semiconductor Revenue by Manufacturer (2021-2026)
  • 3.3 Global Dry Etching Equipment for Semiconductor Average Price by Manufacturer (2021-2026)
  • 3.4 Market Share Analysis (2025)
    • 3.4.1 Producer Shipments of Dry Etching Equipment for Semiconductor by Manufacturer Revenue ($MM) and Market Share (%): 2025
    • 3.4.2 Top 3 Dry Etching Equipment for Semiconductor Manufacturer Market Share in 2025
    • 3.4.3 Top 6 Dry Etching Equipment for Semiconductor Manufacturer Market Share in 2025
  • 3.5 Dry Etching Equipment for Semiconductor Market: Overall Company Footprint Analysis
    • 3.5.1 Dry Etching Equipment for Semiconductor Market: Region Footprint
    • 3.5.2 Dry Etching Equipment for Semiconductor Market: Company Product Type Footprint
    • 3.5.3 Dry Etching Equipment for Semiconductor Market: Company Product Application Footprint
  • 3.6 New Market Entrants and Barriers to Market Entry
  • 3.7 Mergers, Acquisition, Agreements, and Collaborations

4 Consumption Analysis by Region

  • 4.1 Global Dry Etching Equipment for Semiconductor Market Size by Region
    • 4.1.1 Global Dry Etching Equipment for Semiconductor Sales Quantity by Region (2021-2032)
    • 4.1.2 Global Dry Etching Equipment for Semiconductor Consumption Value by Region (2021-2032)
    • 4.1.3 Global Dry Etching Equipment for Semiconductor Average Price by Region (2021-2032)
  • 4.2 North America Dry Etching Equipment for Semiconductor Consumption Value (2021-2032)
  • 4.3 Europe Dry Etching Equipment for Semiconductor Consumption Value (2021-2032)
  • 4.4 Asia-Pacific Dry Etching Equipment for Semiconductor Consumption Value (2021-2032)
  • 4.5 South America Dry Etching Equipment for Semiconductor Consumption Value (2021-2032)
  • 4.6 Middle East & Africa Dry Etching Equipment for Semiconductor Consumption Value (2021-2032)

5 Market Segment by Type

  • 5.1 Global Dry Etching Equipment for Semiconductor Sales Quantity by Type (2021-2032)
  • 5.2 Global Dry Etching Equipment for Semiconductor Consumption Value by Type (2021-2032)
  • 5.3 Global Dry Etching Equipment for Semiconductor Average Price by Type (2021-2032)

6 Market Segment by Application

  • 6.1 Global Dry Etching Equipment for Semiconductor Sales Quantity by Application (2021-2032)
  • 6.2 Global Dry Etching Equipment for Semiconductor Consumption Value by Application (2021-2032)
  • 6.3 Global Dry Etching Equipment for Semiconductor Average Price by Application (2021-2032)

7 North America

  • 7.1 North America Dry Etching Equipment for Semiconductor Sales Quantity by Type (2021-2032)
  • 7.2 North America Dry Etching Equipment for Semiconductor Sales Quantity by Application (2021-2032)
  • 7.3 North America Dry Etching Equipment for Semiconductor Market Size by Country
    • 7.3.1 North America Dry Etching Equipment for Semiconductor Sales Quantity by Country (2021-2032)
    • 7.3.2 North America Dry Etching Equipment for Semiconductor Consumption Value by Country (2021-2032)
    • 7.3.3 United States Market Size and Forecast (2021-2032)
    • 7.3.4 Canada Market Size and Forecast (2021-2032)
    • 7.3.5 Mexico Market Size and Forecast (2021-2032)

8 Europe

  • 8.1 Europe Dry Etching Equipment for Semiconductor Sales Quantity by Type (2021-2032)
  • 8.2 Europe Dry Etching Equipment for Semiconductor Sales Quantity by Application (2021-2032)
  • 8.3 Europe Dry Etching Equipment for Semiconductor Market Size by Country
    • 8.3.1 Europe Dry Etching Equipment for Semiconductor Sales Quantity by Country (2021-2032)
    • 8.3.2 Europe Dry Etching Equipment for Semiconductor Consumption Value by Country (2021-2032)
    • 8.3.3 Germany Market Size and Forecast (2021-2032)
    • 8.3.4 France Market Size and Forecast (2021-2032)
    • 8.3.5 United Kingdom Market Size and Forecast (2021-2032)
    • 8.3.6 Russia Market Size and Forecast (2021-2032)
    • 8.3.7 Italy Market Size and Forecast (2021-2032)

9 Asia-Pacific

  • 9.1 Asia-Pacific Dry Etching Equipment for Semiconductor Sales Quantity by Type (2021-2032)
  • 9.2 Asia-Pacific Dry Etching Equipment for Semiconductor Sales Quantity by Application (2021-2032)
  • 9.3 Asia-Pacific Dry Etching Equipment for Semiconductor Market Size by Region
    • 9.3.1 Asia-Pacific Dry Etching Equipment for Semiconductor Sales Quantity by Region (2021-2032)
    • 9.3.2 Asia-Pacific Dry Etching Equipment for Semiconductor Consumption Value by Region (2021-2032)
    • 9.3.3 China Market Size and Forecast (2021-2032)
    • 9.3.4 Japan Market Size and Forecast (2021-2032)
    • 9.3.5 South Korea Market Size and Forecast (2021-2032)
    • 9.3.6 India Market Size and Forecast (2021-2032)
    • 9.3.7 Southeast Asia Market Size and Forecast (2021-2032)
    • 9.3.8 Australia Market Size and Forecast (2021-2032)

10 South America

  • 10.1 South America Dry Etching Equipment for Semiconductor Sales Quantity by Type (2021-2032)
  • 10.2 South America Dry Etching Equipment for Semiconductor Sales Quantity by Application (2021-2032)
  • 10.3 South America Dry Etching Equipment for Semiconductor Market Size by Country
    • 10.3.1 South America Dry Etching Equipment for Semiconductor Sales Quantity by Country (2021-2032)
    • 10.3.2 South America Dry Etching Equipment for Semiconductor Consumption Value by Country (2021-2032)
    • 10.3.3 Brazil Market Size and Forecast (2021-2032)
    • 10.3.4 Argentina Market Size and Forecast (2021-2032)

11 Middle East & Africa

  • 11.1 Middle East & Africa Dry Etching Equipment for Semiconductor Sales Quantity by Type (2021-2032)
  • 11.2 Middle East & Africa Dry Etching Equipment for Semiconductor Sales Quantity by Application (2021-2032)
  • 11.3 Middle East & Africa Dry Etching Equipment for Semiconductor Market Size by Country
    • 11.3.1 Middle East & Africa Dry Etching Equipment for Semiconductor Sales Quantity by Country (2021-2032)
    • 11.3.2 Middle East & Africa Dry Etching Equipment for Semiconductor Consumption Value by Country (2021-2032)
    • 11.3.3 Turkey Market Size and Forecast (2021-2032)
    • 11.3.4 Egypt Market Size and Forecast (2021-2032)
    • 11.3.5 Saudi Arabia Market Size and Forecast (2021-2032)
    • 11.3.6 South Africa Market Size and Forecast (2021-2032)

12 Market Dynamics

  • 12.1 Dry Etching Equipment for Semiconductor Market Drivers
  • 12.2 Dry Etching Equipment for Semiconductor Market Restraints
  • 12.3 Dry Etching Equipment for Semiconductor Trends Analysis
  • 12.4 Porters Five Forces Analysis
    • 12.4.1 Threat of New Entrants
    • 12.4.2 Bargaining Power of Suppliers
    • 12.4.3 Bargaining Power of Buyers
    • 12.4.4 Threat of Substitutes
    • 12.4.5 Competitive Rivalry

13 Raw Material and Industry Chain

  • 13.1 Raw Material of Dry Etching Equipment for Semiconductor and Key Manufacturers
  • 13.2 Manufacturing Costs Percentage of Dry Etching Equipment for Semiconductor
  • 13.3 Dry Etching Equipment for Semiconductor Production Process
  • 13.4 Industry Value Chain Analysis

14 Shipments by Distribution Channel

  • 14.1 Sales Channel
    • 14.1.1 Direct to End-User
    • 14.1.2 Distributors
  • 14.2 Dry Etching Equipment for Semiconductor Typical Distributors
  • 14.3 Dry Etching Equipment for Semiconductor Typical Customers

15 Research Findings and Conclusion

    16 Appendix

    • 16.1 Methodology
    • 16.2 Research Process and Data Source

    According to our (Global Info Research) latest study, the global Dry Etching Equipment for Semiconductor market size was valued at US$ 22630 million in 2025 and is forecast to a readjusted size of US$ 36520 million by 2032 with a CAGR of 7.2% during review period.
    Dry etching equipment is a type of semiconductor manufacturing tool used to remove material from a wafer surface using plasma or reactive gases, rather than liquid chemicals. This process enables precise pattern transfer with high anisotropy, critical for advanced semiconductor fabrication. Common techniques include reactive ion etching (RIE), inductively coupled plasma (ICP) etching, and deep reactive ion etching (DRIE). Dry etching systems are essential for producing microelectronic devices with fine features, such as logic chips, memory, and MEMS structures, offering superior control, selectivity, and uniformity compared to wet etching methods.
    The semiconductor dry etching equipment market is primarily driven by the continuous advancement of advanced-node chips and the widespread adoption of emerging technologies. The rapid development of 5G, artificial intelligence (AI), high-performance computing (HPC), and the Internet of Things (IoT) has increased demand for higher precision and smaller feature sizes, pushing dry etching technology toward finer and more controllable processes. Additionally, the semiconductor industry's stringent requirements for production capacity and yield, along with the rise of 3D NAND, advanced logic chips, and third-generation semiconductors (e.g., SiC/GaN), further stimulate market demand for dry etching equipment.
    The dry etching equipment market currently exhibits three major trends: First, increasing process precision, as the adoption of extreme ultraviolet (EUV) lithography drives etching processes toward higher accuracy. Second, equipment intelligence, with AI and big data analytics being integrated to optimize etching processes, improving stability and production efficiency. Third, application diversification, as dry etching expands beyond traditional silicon-based semiconductors into advanced packaging, MEMS, and power devices. Furthermore, the localization trend in the global semiconductor supply chain is accelerating domestic R&D and production capacity expansion for etching equipment in regions like China and South Korea.
    This report is a detailed and comprehensive analysis for global Dry Etching Equipment for Semiconductor market. Both quantitative and qualitative analyses are presented by manufacturers, by region & country, by Type and by Application. As the market is constantly changing, this report explores the competition, supply and demand trends, as well as key factors that contribute to its changing demands across many markets. Company profiles and product examples of selected competitors, along with market share estimates of some of the selected leaders for the year 2025, are provided.
    Key Features:
    Global Dry Etching Equipment for Semiconductor market size and forecasts, in consumption value ($ Million), sales quantity (Units), and average selling prices (K US$/Unit), 2021-2032
    Global Dry Etching Equipment for Semiconductor market size and forecasts by region and country, in consumption value ($ Million), sales quantity (Units), and average selling prices (K US$/Unit), 2021-2032
    Global Dry Etching Equipment for Semiconductor market size and forecasts, by Type and by Application, in consumption value ($ Million), sales quantity (Units), and average selling prices (K US$/Unit), 2021-2032
    Global Dry Etching Equipment for Semiconductor market shares of main players, shipments in revenue ($ Million), sales quantity (Units), and ASP (K US$/Unit), 2021-2026
    The Primary Objectives in This Report Are:
    To determine the size of the total market opportunity of global and key countries
    To assess the growth potential for Dry Etching Equipment for Semiconductor
    To forecast future growth in each product and end-use market
    To assess competitive factors affecting the marketplace
    This report profiles key players in the global Dry Etching Equipment for Semiconductor market based on the following parameters - company overview, sales quantity, revenue, price, gross margin, product portfolio, geographical presence, and key developments. Key companies covered as a part of this study include Lam Research, Tokyo Electron Limited, Applied Materials, Hitachi High-Tech, SEMES, AMEC, NAURA, SPTS Technologies (KLA), Oxford Instruments, ULVAC, etc.
    This report also provides key insights about market drivers, restraints, opportunities, new product launches or approvals.
    Market Segmentation
    Dry Etching Equipment for Semiconductor market is split by Type and by Application. For the period 2021-2032, the growth among segments provides accurate calculations and forecasts for consumption value by Type, and by Application in terms of volume and value. This analysis can help you expand your business by targeting qualified niche markets.
    Market segment by Type
    Inductively Coupled Plasma (ICP)
    Capacitive Coupled Plasma (CCP)
    Reactive Ion Etching (RIE)
    Deep Reactive Ion Etching (DRIE)
    Others
    Market segment by Application
    Logic and Memory
    Power Device
    MEMS
    Others
    Major players covered
    Lam Research
    Tokyo Electron Limited
    Applied Materials
    Hitachi High-Tech
    SEMES
    AMEC
    NAURA
    SPTS Technologies (KLA)
    Oxford Instruments
    ULVAC
    Plasma-Therm
    GigaLane
    VM
    Jusung Engineering
    SAMCO
    Market segment by region, regional analysis covers
    North America (United States, Canada, and Mexico)
    Europe (Germany, France, United Kingdom, Russia, Italy, and Rest of Europe)
    Asia-Pacific (China, Japan, Korea, India, Southeast Asia, and Australia)
    South America (Brazil, Argentina, Colombia, and Rest of South America)
    Middle East & Africa (Saudi Arabia, UAE, Egypt, South Africa, and Rest of Middle East & Africa)
    The content of the study subjects, includes a total of 15 chapters:
    Chapter 1, to describe Dry Etching Equipment for Semiconductor product scope, market overview, market estimation caveats and base year.
    Chapter 2, to profile the top manufacturers of Dry Etching Equipment for Semiconductor, with price, sales quantity, revenue, and global market share of Dry Etching Equipment for Semiconductor from 2021 to 2026.
    Chapter 3, the Dry Etching Equipment for Semiconductor competitive situation, sales quantity, revenue, and global market share of top manufacturers are analyzed emphatically by landscape contrast.
    Chapter 4, the Dry Etching Equipment for Semiconductor breakdown data are shown at the regional level, to show the sales quantity, consumption value, and growth by regions, from 2021 to 2032.
    Chapter 5 and 6, to segment the sales by Type and by Application, with sales market share and growth rate by Type, by Application, from 2021 to 2032.
    Chapter 7, 8, 9, 10 and 11, to break the sales data at the country level, with sales quantity, consumption value, and market share for key countries in the world, from 2021 to 2026.and Dry Etching Equipment for Semiconductor market forecast, by regions, by Type, and by Application, with sales and revenue, from 2027 to 2032.
    Chapter 12, market dynamics, drivers, restraints, trends, and Porters Five Forces analysis.
    Chapter 13, the key raw materials and key suppliers, and industry chain of Dry Etching Equipment for Semiconductor.
    Chapter 14 and 15, to describe Dry Etching Equipment for Semiconductor sales channel, distributors, customers, research findings and conclusion.

    Buy now